Cui Cunxing, Feng Qibo, Zhang Bin
Appl Opt. 2015 Apr 10;54(11):3122-31. doi: 10.1364/AO.54.003122.
The straightness measurement systematic errors induced by error crosstalk, fabrication and installation deviation of optical element, measurement sensitivity variation, and the Abbe error in six degree-of-freedom simultaneous measurement system are analyzed in detail in this paper. Models for compensating these systematic errors were established and verified through a series of comparison experiments with the Automated Precision Inc. (API) 5D measurement system, and the experimental results showed that the maximum deviation in straightness error measurement could be reduced from 6.4 to 0.9 μm in the x-direction, and 8.8 to 0.8 μm in the y-direction, after the compensation.
本文详细分析了六自由度同步测量系统中由误差串扰、光学元件制造与安装偏差、测量灵敏度变化以及阿贝误差引起的直线度测量系统误差。建立了这些系统误差的补偿模型，并通过与自动精密公司（API）5D测量系统进行的一系列对比实验进行了验证。实验结果表明，补偿后直线度误差测量的最大偏差在x方向上可从6.4μm减小至0.9μm，在y方向上可从8.8μm减小至0.8μm。
