• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利：CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法，用中文像聊天一样搜索，搜遍4000万医学文献。AI智能推荐，让科研检索更轻松。

立即免费搜索

文件翻译

保留排版，准确专业，支持PDF/Word/PPT等文件格式，支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述，25分钟生成高质量综述，智能提取关键信息，辅助科研写作。

立即免费体验

基于虚拟科里奥利力的模式匹配微机械优化音叉陀螺仪，无正交归零回路

Virtual Coriolis-Force-Based Mode-Matching Micromachine-Optimized Tuning Fork Gyroscope without a Quadrature-Nulling Loop.

作者信息

Wu Yixuan, Yuan Weizheng, Xue Yanjun, Chang Honglong, Shen Qiang

机构信息

School of Mechanical Engineering, Northwestern Polytechnical University, Xi'an 710072, China.

MOE Key Laboratory of Micro and Nano Systems for Aerospace, Northwestern Polytechnical University, Xi'an 710072, China.

出版信息

Micromachines (Basel). 2023 Aug 31;14(9):1704. doi: 10.3390/mi14091704.

DOI:10.3390/mi14091704
PMID:37763867
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10537024/
Abstract

A VCF-based mode-matching micromachine-optimized tuning fork gyroscope is proposed to not only maximize the scale factor of the device, but also avoid use of an additional quadrature-nulling loop to prevent structure complexity, pick-up electrode occupation, and coupling with a mode-matching loop. In detail, a mode-matching, closed-loop system without a quadrature-nulling loop is established, and the corresponding convergence and matching error are quantitatively analyzed. The optimal straight beam of the gyro structure is then modeled to significantly reduce the quadrature coupling. The test results show that the frequency split is narrowed from 20 Hz to 0.014 Hz. The scale factor is improved 20.6 times and the bias instability (BI) is suppressed 3.28 times. The observed matching accuracy demonstrates that a mode matching system without a quadrature suppression loop is feasible and that the proposed device represents a competitive design for a mode-matching gyroscope.

摘要

提出了一种基于可变电容式（VCF）模式匹配的微机械优化音叉陀螺仪，不仅可以最大化器件的比例因子，还能避免使用额外的正交抑制环路，以防止结构复杂性、占用拾取电极以及与模式匹配环路耦合。具体而言，建立了一个没有正交抑制环路的模式匹配闭环系统，并对相应的收敛和匹配误差进行了定量分析。然后对陀螺仪结构的最佳直梁进行建模，以显著降低正交耦合。测试结果表明，频率分裂从20 Hz缩小到0.014 Hz。比例因子提高了20.6倍，偏置不稳定性（BI）降低了3.28倍。观察到的匹配精度表明，没有正交抑制环路的模式匹配系统是可行的，并且所提出的器件是模式匹配陀螺仪的一种有竞争力的设计。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/97ab2f3ced82/micromachines-14-01704-g019.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/fbfa99ef972a/micromachines-14-01704-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/1e75a7835a63/micromachines-14-01704-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/3c6e6b73c4e1/micromachines-14-01704-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/309ef79c46f7/micromachines-14-01704-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/880ec7bfb1b6/micromachines-14-01704-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/4fc11199c709/micromachines-14-01704-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/6035ad08f840/micromachines-14-01704-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/2f01c53d1836/micromachines-14-01704-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/ab2861bc3b19/micromachines-14-01704-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/8cf0c906accb/micromachines-14-01704-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/9eea04b7c0af/micromachines-14-01704-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/50927b0cb257/micromachines-14-01704-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/ff8103473d32/micromachines-14-01704-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/82444a9221f4/micromachines-14-01704-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/22a472319110/micromachines-14-01704-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/6d55038e9419/micromachines-14-01704-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/03f5b3d45661/micromachines-14-01704-g017.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/a5d2798cb88b/micromachines-14-01704-g018.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/97ab2f3ced82/micromachines-14-01704-g019.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/fbfa99ef972a/micromachines-14-01704-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/1e75a7835a63/micromachines-14-01704-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/3c6e6b73c4e1/micromachines-14-01704-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/309ef79c46f7/micromachines-14-01704-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/880ec7bfb1b6/micromachines-14-01704-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/4fc11199c709/micromachines-14-01704-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/6035ad08f840/micromachines-14-01704-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/2f01c53d1836/micromachines-14-01704-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/ab2861bc3b19/micromachines-14-01704-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/8cf0c906accb/micromachines-14-01704-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/9eea04b7c0af/micromachines-14-01704-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/50927b0cb257/micromachines-14-01704-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/ff8103473d32/micromachines-14-01704-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/82444a9221f4/micromachines-14-01704-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/22a472319110/micromachines-14-01704-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/6d55038e9419/micromachines-14-01704-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/03f5b3d45661/micromachines-14-01704-g017.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/a5d2798cb88b/micromachines-14-01704-g018.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4b45/10537024/97ab2f3ced82/micromachines-14-01704-g019.jpg

相似文献

1
Virtual Coriolis-Force-Based Mode-Matching Micromachine-Optimized Tuning Fork Gyroscope without a Quadrature-Nulling Loop.基于虚拟科里奥利力的模式匹配微机械优化音叉陀螺仪，无正交归零回路
Micromachines (Basel). 2023 Aug 31;14(9):1704. doi: 10.3390/mi14091704.
2
Design of Readout Circuit with Quadrature Error and Auxiliary PLL for MEMS Vibratory Gyroscope.用于MEMS振动陀螺仪的具有正交误差和辅助锁相环的读出电路设计
Sensors (Basel). 2020 Aug 14;20(16):4564. doi: 10.3390/s20164564.
3
Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force.基于虚拟科里奥利力的MEMS磁盘谐振器陀螺仪自动模式匹配方法
Micromachines (Basel). 2020 Feb 18;11(2):210. doi: 10.3390/mi11020210.
4
MEMS Gyroscope Automatic Real-Time Mode-Matching Method Based on Phase-Shifted 45° Additional Force Demodulation.基于相移 45°附加力解调的 MEMS 陀螺仪自动实时模态匹配方法。
Sensors (Basel). 2018 Sep 7;18(9):3001. doi: 10.3390/s18093001.
5
Effect of Quadrature Control Mode on ZRO Drift of MEMS Gyroscope and Online Compensation Method.正交控制模式对MEMS陀螺仪零偏漂移的影响及在线补偿方法
Micromachines (Basel). 2022 Mar 8;13(3):419. doi: 10.3390/mi13030419.
6
Automatic Frequency Tuning Technology for Dual-Mass MEMS Gyroscope Based on a Quadrature Modulation Signal.基于正交调制信号的双质量MEMS陀螺仪自动频率调谐技术
Micromachines (Basel). 2018 Oct 10;9(10):511. doi: 10.3390/mi9100511.
7
A Digital Calibration Technique of MEMS Gyroscope for Closed-Loop Mode-Matching Control.一种用于闭环模式匹配控制的MEMS陀螺仪数字校准技术。
Micromachines (Basel). 2019 Jul 25;10(8):496. doi: 10.3390/mi10080496.
8
A Novel Self-Calibration Method and Experiment of MEMS Gyroscope Based on Virtual Coriolis Force.一种基于虚拟科里奥利力的新型MEMS陀螺仪自校准方法及实验
Micromachines (Basel). 2018 Jun 28;9(7):328. doi: 10.3390/mi9070328.
9
Design and Optimization of a Novel MEMS Tuning Fork Gyroscope Microstructure.一种新型微机电系统（MEMS）音叉陀螺仪微结构的设计与优化
Micromachines (Basel). 2022 Jan 24;13(2):172. doi: 10.3390/mi13020172.
10
Mechanical Coupling Error Suppression Technology for an Improved Decoupled Dual-Mass Micro-Gyroscope.用于改进型解耦双质量微陀螺仪的机械耦合误差抑制技术
Sensors (Basel). 2016 Apr 8;16(4):503. doi: 10.3390/s16040503.

引用本文的文献

1
Comparative Noise Analysis of Readout Circuit in Hemispherical Resonator Gyroscope.半球谐振陀螺仪读出电路的噪声对比分析
Micromachines (Basel). 2025 Jul 9;16(7):802. doi: 10.3390/mi16070802.

本文引用的文献

1
A Novel Mechanical Frequency Tuning Method Based on Mass-Stiffness Decoupling for MEMS Gyroscopes.一种基于质量-刚度解耦的新型微机电系统（MEMS）陀螺仪机械频率调谐方法。
Micromachines (Basel). 2022 Jun 30;13(7):1052. doi: 10.3390/mi13071052.
2
Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force.基于虚拟科里奥利力的MEMS磁盘谐振器陀螺仪自动模式匹配方法
Micromachines (Basel). 2020 Feb 18;11(2):210. doi: 10.3390/mi11020210.
3
A Digital Calibration Technique of MEMS Gyroscope for Closed-Loop Mode-Matching Control.
一种用于闭环模式匹配控制的MEMS陀螺仪数字校准技术。
Micromachines (Basel). 2019 Jul 25;10(8):496. doi: 10.3390/mi10080496.
4
Gyroscope Technology and Applications: A Review in the Industrial Perspective.陀螺仪技术与应用：工业视角综述
Sensors (Basel). 2017 Oct 7;17(10):2284. doi: 10.3390/s17102284.