He Chengxing, Wang Yubo, Waldfried Carlo, Yang Guangcanlan, Zheng Jun-Fei, Hu Shu, Tang Hong X
Opt Express. 2023 Oct 9;31(21):33923-33929. doi: 10.1364/OE.492510.
UV and visible photonics enable applications ranging from spectroscopic sensing to communication and quantum information processing. Photonics structures in these wavelength regimes, however, tend to experience higher loss than their IR counterpart. Particularly in the near-UV band, on-chip optical microresonators have not yet achieved a quality factor beyond 1 million. Here, we report ultra-low-loss photonic waveguides and resonators patterned from alumina thin films prepared by a highly scalable atomic layer deposition process. We demonstrate ultra high Q factor of 1.5×10 at 390 nm, a record value at UV bands, and 1.9×10 at 488.5 nm.
紫外和可见光光子学支持从光谱传感到通信以及量子信息处理等一系列应用。然而，这些波长范围内的光子学结构往往比红外波段的结构具有更高的损耗。特别是在近紫外波段，片上光学微谐振器的品质因数尚未超过100万。在此，我们报道了通过高度可扩展的原子层沉积工艺制备的氧化铝薄膜图案化的超低损耗光子波导和谐振器。我们展示了在390纳米处1.5×10的超高品质因数，这是紫外波段的记录值，在488.5纳米处为1.9×10。
