Zhang Zhiming, Yan Peng
Key Laboratory of High-efficiency and Clean Mechanical Manufacture of MOE, School of Mechanical Engineering, Shandong University, Jinan 250061, China.
Rev Sci Instrum. 2023 Jun 1;94(6). doi: 10.1063/5.0145677.
In this paper, a robust composite control strategy in the framework of unified infinite-dimensional H∞ optimal control is developed to support nano-scale periodic tracking with improved non-harmonic disturbance attenuation of piezo-actuated nano-stages with sensor-induced measurement delays. In particular, we analyze the electromechanical coupled dynamics and derive a multi-perturbation model, where an extended Youla-Kucera parameterization-based repetitive controller with a disturbance observer is constructed to optimize control performances on high-precision tracking and perturbation rejection. The controller parameters are solved by using a unified infinite-dimensional H∞ optimization method. Comprehensive experiments on a piezo-actuated stage are conducted, where comparative results with representative methods, such as the conventional repetitive control and proportional-integral-derivative control, demonstrate significant performance improvements in hysteresis compensation, trajectory tracking, and disturbance suppression of the proposed method.
