Proyavin Mikhail D, Kotomina Valentina E, Orlovskiy Alexey A, Zaslavsky Vladislav Yu, Morozkin Mikhail V, Palitsin Alexey V, Rodin Yuriy V, Sobolev Dmitriy I, Peskov Nikolay Y
Institute of Applied Physics, Russian Academy of Sciences, 603950 Nizhny Novgorod, Russia.
Micromachines (Basel). 2023 Oct 1;14(10):1897. doi: 10.3390/mi14101897.
In this paper, we studied the operability of various components of vacuum electronic devices manufactured using the novel chemical metallization of photopolymer 3D-printed structures technology (CMPS), which is being applied at the Institute of Applied Physics, Russian Academy of Sciences (IAP RAS), for operation from microwave to sub-terahertz ranges. The key feature of this production method is the 3D printing (SLA/DLP, MJM technologies) of products and their further metallization. The paper presents the main stages of the process of chemical copper plating of polymer bases in various electrodynamic systems with complex shapes. A significant difference in the geometry and operating conditions of the created elements forms certain approaches to their production, as described in this work. Experimental studies of the implemented microwave components were carried out up to 700 GHz in the "cold" measurements; some electrodynamic structures were examined under conditions of sub-gigawatt peak power; and complex-shaped electrodes with cooling channels were tested under a continuous high thermal load. The conducted research has demonstrated the high potential of the developed methods of additive manufacturing of microwave device components and the prospects for their successful application in the described areas.
在本文中，我们研究了采用光聚合物3D打印结构的新型化学金属化技术（CMPS）制造的真空电子器件各组件的可操作性，该技术正在俄罗斯科学院应用物理研究所（IAP RAS）得到应用，用于从微波到亚太赫兹频段的运行。这种生产方法的关键特性是产品的3D打印（SLA/DLP、MJM技术）及其后续金属化。本文介绍了在各种具有复杂形状的电动系统中对聚合物基体进行化学镀铜过程的主要阶段。如本文所述，所创建元件的几何形状和运行条件存在显著差异，这形成了其生产的某些方法。在“冷”测量中对已实现的微波组件进行了高达700 GHz的实验研究；在亚千兆瓦峰值功率条件下对一些电动结构进行了检查；对带有冷却通道的复杂形状电极在持续高热负荷下进行了测试。所开展的研究证明了微波器件组件增材制造所开发方法的巨大潜力以及它们在所述领域成功应用的前景。
