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具有脊状表面结构的聚二甲基硅氧烷薄膜柔性压阻传感器。

Flexible Piezoresistive Sensors from Polydimethylsiloxane Films with Ridge-like Surface Structures.

作者信息

Liu Ming, Liu Xianchao, Yang Fuqian

机构信息

Fujian Provincial Key Laboratory of Terahertz Functional Devices and Intelligent Sensing, School of Mechanical Engineering and Automation, Fuzhou University, Fuzhou 350108, China.

The Engineering Research Center for CAD/CAM of Fujian Universities, Putian University, Putian 351100, China.

出版信息

Micromachines (Basel). 2023 Oct 18;14(10):1940. doi: 10.3390/mi14101940.

Abstract

Developing flexible sensors and actuators is of paramount importance for wearable devices and systems. In this research, we developed a simple and facile technique to construct flexible piezoresistive sensors from polydimethylsiloxane films with ridge-like surface structures and laser-induced porous graphene. Using a replication strategy, we prepared the ridge-like surface structures from sandpapers. The piezoresistive sensors exhibit excellent sensitivity with a response time of less than 50 ms and long-term cyclic stability under mechanical loading. The smallest weight they can sense is ~96 mg. We demonstrated applications of the piezoresistive sensors in the sensing of bio-related activities, including muscle contraction, finger flexion, wrist flexion, elbow bending, knee bending, swallowing, respiration, sounds, and pulses.

摘要

开发柔性传感器和致动器对于可穿戴设备和系统至关重要。在本研究中,我们开发了一种简单易行的技术,用具有脊状表面结构的聚二甲基硅氧烷薄膜和激光诱导多孔石墨烯构建柔性压阻传感器。采用复制策略,我们用砂纸制备了脊状表面结构。该压阻传感器具有出色的灵敏度,响应时间小于50毫秒,在机械负载下具有长期循环稳定性。它们能感知的最小重量约为96毫克。我们展示了压阻传感器在生物相关活动传感中的应用,包括肌肉收缩、手指弯曲、手腕弯曲、肘部弯曲、膝盖弯曲、吞咽、呼吸、声音和脉搏。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7b89/10608881/98fc9a1b28f0/micromachines-14-01940-g001.jpg

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