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具有自修复功能的高性能柔性压力传感器用于触觉反馈。

High-Performance Flexible Pressure Sensor with a Self-Healing Function for Tactile Feedback.

机构信息

Key Laboratory of Material Physics, Ministry of Education, School of Physics and Microelectronics, Zhengzhou University, Zhengzhou, 450052, P. R. China.

Center for Nanoscale Characterization and Devices (CNCD), School of Physics and Wuhan National Laboratory for Optoelectronics (WNLO), Huazhong University of Science and Technology (HUST), Wuhan, 430074, P. R. China.

出版信息

Adv Sci (Weinh). 2022 Jul;9(20):e2200507. doi: 10.1002/advs.202200507. Epub 2022 Apr 15.

Abstract

High-performance flexible pressure sensors have attracted a great deal of attention, owing to its potential applications such as human activity monitoring, man-machine interaction, and robotics. However, most high-performance flexible pressure sensors are complex and costly to manufacture. These sensors cannot be repaired after external mechanical damage and lack of tactile feedback applications. Herein, a high-performance flexible pressure sensor based on MXene/polyurethane (PU)/interdigital electrodes is fabricated by using a low-cost and universal spray method. The sprayed MXene on the spinosum structure PU and other arbitrary flexible substrates (represented by polyimide and membrane filter) act as the sensitive layer and the interdigital electrodes, respectively. The sensor shows an ultrahigh sensitivity (up to 509.8 kPa ), extremely fast response speed (67.3 ms), recovery speed (44.8 ms), and good stability (10 000 cycles) due to the interaction between the sensitive layer and the interdigital electrodes. In addition, the hydrogen bond of PU endows the device with the self-healing function. The sensor can also be integrated with a circuit, which can realize tactile feedback function. This MXene-based high-performance pressure sensor, along with its designing/fabrication, is expected to be widely used in human activity detection, electronic skin, intelligent robots, and many other aspects.

摘要

高性能柔性压力传感器因其在人体活动监测、人机交互和机器人等方面的潜在应用而受到广泛关注。然而,大多数高性能柔性压力传感器制造复杂且成本高昂。这些传感器在外部机械损坏后无法修复,并且缺乏触觉反馈应用。本文采用一种低成本且通用的喷涂方法,制备了基于 MXene/聚氨基甲酸酯(PU)/叉指电极的高性能柔性压力传感器。喷涂在棘突状结构 PU 上的 MXene 和其他任意柔性基底(以聚酰亚胺和膜过滤器为代表)分别作为敏感层和叉指电极。由于敏感层和叉指电极之间的相互作用,传感器表现出超高的灵敏度(高达 509.8 kPa)、极快的响应速度(67.3 ms)、恢复速度(44.8 ms)和良好的稳定性(10000 次循环)。此外,PU 的氢键赋予了器件自修复功能。该传感器还可以与电路集成,实现触觉反馈功能。这种基于 MXene 的高性能压力传感器及其设计/制造有望广泛应用于人体活动检测、电子皮肤、智能机器人等诸多领域。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8fd4/9284154/40084115beec/ADVS-9-2200507-g006.jpg

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