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六方氮化硼作为近紫外发光二极管中氮化镓外延生长的中间层

Hexagonal Boron Nitride as an Intermediate Layer for Gallium Nitride Epitaxial Growth in Near-Ultraviolet Light-Emitting Diodes.

作者信息

Park Ah-Hyun, Seo Tae-Hoon

机构信息

R&D Center, Flyer, Daejeon 34141, Republic of Korea.

Green Energy & Nano Technology R&D Group, Korea Institute of Industrial Technology, Gwangju 61012, Republic of Korea.

出版信息

Materials (Basel). 2023 Nov 17;16(22):7216. doi: 10.3390/ma16227216.

Abstract

We introduce the development of gallium nitride (GaN) layers by employing graphene and hexagonal boron nitride (h-BN) as intermediary substrates. This study demonstrated the successful growth of GaN with a uniformly smooth surface morphology on h-BN. In order to evaluate the crystallinity of GaN grown on h-BN, a comparison was conducted with GaN grown on a sapphire substrate. Photoluminescence spectroscopy and X-ray diffraction confirmed that the crystallinity of GaN deposited on h-BN was inferior to that of GaN grown on conventional GaN. To validate the practical applicability of the GaN layer grown on h-BN, we subsequently grew an NUV-LED structure and fabricated a device that operated well in optoelectrical performance experiments. Our findings validate the potential usefulness of h-BN to be a substrate in the direct growth of a GaN layer.

摘要

我们介绍了通过使用石墨烯和六方氮化硼(h-BN)作为中间衬底来生长氮化镓(GaN)层的方法。本研究证明了在h-BN上成功生长出具有均匀光滑表面形貌的GaN。为了评估在h-BN上生长的GaN的结晶度,与在蓝宝石衬底上生长的GaN进行了比较。光致发光光谱和X射线衍射证实,沉积在h-BN上的GaN的结晶度低于在传统GaN上生长的GaN。为了验证在h-BN上生长的GaN层的实际适用性,我们随后生长了一个近紫外发光二极管(NUV-LED)结构,并制造了一个在光电性能实验中运行良好的器件。我们的研究结果证实了h-BN作为直接生长GaN层的衬底的潜在用途。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3c82/10673368/d9d65406f173/materials-16-07216-g001.jpg

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