Nwatu Daniel, Kip Detlef, Hasse Kore
Opt Express. 2023 Nov 6;31(23):37618-37629. doi: 10.1364/OE.500439.
Here, we report on the fabrication of cm-long microchannels in LiNbO by selective etching of femtosecond laser inscribed tracks using hydrofluoric acid. We achieved a 1 cm long microchannel after 300 h of etching a single track inscribed into the volume along the optical axis of LiNbO. Furthermore, we investigated the dependence of the etching behavior on various writing parameters. Highly selective etching with a selectivity up to 10 was achieved and a functional relationship between the etched depth and time was found. Thus, our results set the first milestone for future fabrication of 3D-hollow microstructures in the volume of LiNbO combining its outstanding physical properties such as the strong nonlinearity as well as the acousto- and electrooptic properties with both microfluidic and photonic structures in a monolithic setup.
在此，我们报告了通过使用氢氟酸对飞秒激光写入的轨迹进行选择性蚀刻，在铌酸锂中制备厘米长微通道的方法。沿铌酸锂光轴在其内部写入一条轨迹，经过300小时蚀刻后，我们得到了一条1厘米长的微通道。此外，我们研究了蚀刻行为对各种写入参数的依赖性。实现了高达10的选择性的高度选择性蚀刻，并发现了蚀刻深度与时间之间的函数关系。因此，我们的结果为未来在铌酸锂内部制备三维中空微结构奠定了首个里程碑，该结构将铌酸锂出色的物理特性（如强非线性以及声光和电光特性）与微流体和光子结构在一个整体装置中相结合。
