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基于液态聚二甲基硅氧烷(PDMS)基底调制银膜褶皱的高性能柔性应变传感器。

High-performance flexible strain sensors based on silver film wrinkles modulated by liquid PDMS substrates.

作者信息

Xu Yifan, Chen Miaogen, Yu Senjiang, Zhou Hong

机构信息

Key Laboratory of Intelligent Manufacturing Quality Big Data Tracing and Analysis of Zhejiang Province, College of Science, China Jiliang University Hangzhou 310018 P.R. China

Key Laboratory of Novel Materials for Sensor of Zhejiang Province, College of Materials and Environmental Engineering, Hangzhou Dianzi University Hangzhou 310018 P.R. China

出版信息

RSC Adv. 2023 Nov 17;13(48):33697-33706. doi: 10.1039/d3ra06020a. eCollection 2023 Nov 16.

Abstract

Flexible strain sensors based on controllable surface microstructures in film-substrate systems can be extensively applied in high-tech fields such as human-machine interfaces, electronic skins, and soft robots. However, the rigid functional films are susceptible to structural destruction and interfacial failure under large strains or high loading speeds, limiting the stability and durability of the sensors. Here we report on a facile technique to prepare high-performance flexible strain sensors based on controllable wrinkles by depositing silver films on liquid polydimethylsiloxane (PDMS) substrates. The silver atoms can penetrate into the surface of liquid PDMS to form an interlocking layer during deposition, enhancing the interfacial adhesion greatly. After deposition, the liquid PDMS is spontaneously solidified to stabilize the film microstructures. The surface patterns are well modulated by changing film thickness, prepolymer-to-crosslinker ratio of liquid PDMS, and strain value. The flexible strain sensors based on the silver film/liquid PDMS system show high sensitivity (above 4000), wide sensing range (∼80%), quick response speed (∼80 ms), and good stability (above 6000 cycles), and have a broad application prospect in the fields of health monitoring and motion tracking.

摘要

基于薄膜-基底系统中可控表面微结构的柔性应变传感器可广泛应用于人机界面、电子皮肤和软机器人等高科技领域。然而,刚性功能薄膜在大应变或高加载速度下易发生结构破坏和界面失效,限制了传感器的稳定性和耐久性。在此,我们报道一种简便技术,通过在液态聚二甲基硅氧烷(PDMS)基底上沉积银膜来制备基于可控褶皱的高性能柔性应变传感器。在沉积过程中,银原子可渗入液态PDMS表面形成互锁层,极大增强界面附着力。沉积后,液态PDMS自发固化以稳定薄膜微结构。通过改变膜厚、液态PDMS的预聚物与交联剂比例以及应变值,可很好地调控表面图案。基于银膜/液态PDMS系统的柔性应变传感器具有高灵敏度(高于4000)、宽传感范围(约80%)、快速响应速度(约80毫秒)和良好稳定性(高于6000次循环),在健康监测和运动跟踪领域具有广阔应用前景。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/425e/10654890/67a62acfa21e/d3ra06020a-f1.jpg

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