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基于V型槽/皱纹分层阵列的高灵敏度宽传感范围柔性应变传感器

High Sensitivity and a Wide Sensing Range Flexible Strain Sensor Based on the V-Groove/Wrinkles Hierarchical Array.

作者信息

Ji Jin, Zhang Chengpeng, Yang Shaohua, Liu Yongzhi, Wang Jilai, Shi Zhenyu

机构信息

Key Laboratory of High Efficiency and Clean Mechanical Manufacture of Ministry of Education, School of Mechanical Engineering, Shandong University, Jinan, Shandong 250061, China.

National Demonstration Center for Experimental Mechanical Engineering Education, Shandong University, Jinan, Shandong 250061, China.

出版信息

ACS Appl Mater Interfaces. 2022 May 11. doi: 10.1021/acsami.2c04773.

Abstract

Flexible strain sensors occupying a large part of human body detection and wearable electronics, which have a wide sensing range and high sensitivity, are crucial in fully monitoring human motion signals. This study proposed a strategy to construct flexible strain sensors based on the V-groove/wrinkles hierarchical array. The V-groove array was prepared on a polydimethylsiloxane (PDMS) substrate through mold transfer printing. The gold film was sputtered on the prestretching PDMS substrate, and the V-groove/wrinkles hierarchical array was formed after strain release. Compared with the sensors based on single-scale wrinkle structures and a V-groove array, the fabricated strain sensor with the hierarchical array showed high sensitivity (maximum gauge factor up to 2,557.71) and a wide sensing range (up to 45%). In addition, the dynamic characteristics of the sensor were investigated in detail, indicating that the sensor had a fast response (less than 130 ms), a low detection limit (0.1% strain), and good stability (almost no performance loss after 10,000 cycles). In practical applications, the sensor was used to detect sizable physical motion and weak physiological signals, demonstrating great potential application value in human motion detection. This study could provide new ideas for preparing high-performance flexible strain sensors.

摘要

柔性应变传感器在人体检测和可穿戴电子设备中占据很大一部分,具有广泛的传感范围和高灵敏度,对于全面监测人体运动信号至关重要。本研究提出了一种基于V型槽/皱纹分级阵列构建柔性应变传感器的策略。通过模具转移印刷在聚二甲基硅氧烷(PDMS)基板上制备V型槽阵列。在预拉伸的PDMS基板上溅射金膜,应变释放后形成V型槽/皱纹分级阵列。与基于单尺度皱纹结构和V型槽阵列的传感器相比,所制备的具有分级阵列的应变传感器具有高灵敏度(最大应变系数高达2557.71)和宽传感范围(高达45%)。此外,详细研究了传感器的动态特性,表明该传感器具有快速响应(小于130毫秒)、低检测限(0.1%应变)和良好的稳定性(10000次循环后几乎没有性能损失)。在实际应用中,该传感器用于检测较大的身体运动和微弱的生理信号,在人体运动检测中显示出巨大的潜在应用价值。本研究可为制备高性能柔性应变传感器提供新思路。

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