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通过分子束外延在 GaAs(001) 上生长 Ge 及直接带隙 GeSn。

The growth of Ge and direct bandgap GeSn on GaAs (001) by molecular beam epitaxy.

作者信息

Gunder Calbi, Maia de Oliveira Fernando, Wangila Emmanuel, Stanchu Hryhorii, Zamani-Alavijeh Mohammad, Ojo Solomon, Acharya Sudip, Said Abdulla, Li Chen, Mazur Yuriy I, Yu Shui-Qing, Salamo Gregory J

机构信息

Materials Science and Engineering, University of Arkansas Fayetteville AR 72701 USA

Institute of Nanoscience & Engineering, University of Arkansas Fayetteville AR 72701 USA.

出版信息

RSC Adv. 2024 Jan 3;14(2):1250-1257. doi: 10.1039/d3ra06774b. eCollection 2024 Jan 2.

DOI:10.1039/d3ra06774b
PMID:38174282
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10762728/
Abstract

Germanium tin (GeSn) is a tuneable narrow bandgap material, which has shown remarkable promise for the industry of near- and mid-infrared technologies for high efficiency photodetectors and laser devices. Its synthesis is challenged by the lattice mismatch between the GeSn alloy and the substrate on which it is grown, sensitively affecting its crystalline and optical qualities. In this article, we investigate the growth of Ge and GeSn on GaAs (001) substrates using two different buffer layers consisting of Ge/GaAs and Ge/AlAs molecular beam epitaxy. The quality of the Ge layers was compared using X-ray diffraction, atomic force microscopy, reflection high-energy electron diffraction, and photoluminescence. The characterization techniques demonstrate high-quality Ge layers, including atomic steps, when grown on either GaAs or AlAs at a growth temperature between 500-600 °C. The photoluminescence from the Ge layers was similar in relative intensity and linewidth to that of bulk Ge. The Ge growth was followed by the growth of GeSn using a Sn composition gradient and substrate gradient approach to achieve GeSn films with 9 to 10% Sn composition. Characterization of the GeSn films also indicates high-quality gradients based on X-ray diffraction, photoluminescence, and energy-dispersive X-ray spectroscopy measurements. Finally, we were able to demonstrate temperature-dependent PL results showing that for the growth on Ge/GaAs buffer, the direct transition has shifted past the indirect transition to a longer wavelength/lower energy suggesting a direct bandgap GeSn material.

摘要

锗锡(GeSn)是一种可调节的窄带隙材料,在近红外和中红外技术领域,对于高效光电探测器和激光器件展现出了巨大的应用潜力。其合成面临着锗锡合金与其生长衬底之间晶格失配的挑战,这对其晶体和光学质量产生了敏感影响。在本文中,我们使用由锗/砷化镓(Ge/GaAs)和锗/砷化铝(Ge/AlAs)分子束外延组成的两种不同缓冲层,研究了锗和锗锡在砷化镓(001)衬底上的生长情况。使用X射线衍射、原子力显微镜、反射高能电子衍射和光致发光对锗层的质量进行了比较。表征技术表明,当在500 - 600°C的生长温度下生长在砷化镓或砷化铝上时,锗层具有高质量,包括原子台阶。锗层的光致发光在相对强度和线宽方面与块状锗相似。在锗生长之后,采用锡成分梯度和衬底梯度方法生长锗锡,以获得锡成分含量为9%至10%的锗锡薄膜。基于X射线衍射、光致发光和能量色散X射线光谱测量,锗锡薄膜的表征也表明其具有高质量的梯度。最后,我们能够展示与温度相关的光致发光结果,表明对于在锗/砷化镓缓冲层上的生长,直接跃迁已经越过间接跃迁,移向更长波长/更低能量,这表明是一种直接带隙的锗锡材料。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b59/10762728/5b931bf24a5e/d3ra06774b-f9.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b59/10762728/64ad77c1624d/d3ra06774b-f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b59/10762728/dd07e25e1b01/d3ra06774b-f2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b59/10762728/a46b2c9c1d99/d3ra06774b-f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b59/10762728/cb430e9febf5/d3ra06774b-f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b59/10762728/d12dd9f46fb6/d3ra06774b-f5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b59/10762728/f03d274fc517/d3ra06774b-f6.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b59/10762728/42777266ce16/d3ra06774b-f7.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b59/10762728/a8e7d4de347b/d3ra06774b-f8.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b59/10762728/5b931bf24a5e/d3ra06774b-f9.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b59/10762728/64ad77c1624d/d3ra06774b-f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b59/10762728/dd07e25e1b01/d3ra06774b-f2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b59/10762728/a46b2c9c1d99/d3ra06774b-f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b59/10762728/cb430e9febf5/d3ra06774b-f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b59/10762728/d12dd9f46fb6/d3ra06774b-f5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b59/10762728/f03d274fc517/d3ra06774b-f6.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b59/10762728/42777266ce16/d3ra06774b-f7.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b59/10762728/a8e7d4de347b/d3ra06774b-f8.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8b59/10762728/5b931bf24a5e/d3ra06774b-f9.jpg

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引用本文的文献

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Algorithm-Based Linearly Graded Compositions of GeSn on GaAs (001) via Molecular Beam Epitaxy.通过分子束外延在 GaAs(001) 上基于算法的 GeSn 线性梯度成分
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本文引用的文献

1
Study of GeSn based heterostructures: towards optimized group IV MQW LEDs.基于锗锡的异质结构研究:迈向优化的IV族多量子阱发光二极管。
Opt Express. 2016 Jan 25;24(2):1358-67. doi: 10.1364/OE.24.001358.
2
Preparation of the Ge(001) surface towards fabrication of atomic-scale germanium devices.准备用于制造原子尺度锗器件的 Ge(001)表面。
Nanotechnology. 2011 Apr 8;22(14):145604. doi: 10.1088/0957-4484/22/14/145604. Epub 2011 Mar 3.