Zang Haofeng, Zhang Zhiyu, Huang Zuotang, Lu Yonghua, Wang Pei
Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei 230026, China.
Advanced Laser Technology Laboratory of Anhui Province, Hefei, Anhui 230026, China.
Sci Adv. 2024 Jan 12;10(2):eadk2265. doi: 10.1126/sciadv.adk2265. Epub 2024 Jan 10.
A long-range, high-precision, and compact transverse displacement metrology is of crucial importance in both industries and scientific researches. However, it is a great challenge to measure arbitrary two-dimensional (2D) displacement with angstrom-level precision and hundred-micrometer range. Here, we demonstrated a prototype of high-precision 2D-displacement metrology with matrix metasurface. Light passing through the metasurface is diffracted into three beams in horizontal (H), vertical (V), and diagonal (D) linear polarization. 2D transverse displacement of the metasurface relative to the incident light beam is retrieved from the interferential optical powers arisen from coherent superposition between H-polarized and D-polarized beams or V-polarized and D-polarized beams. We experimentally demonstrate that arbitrary displacement in 2D plane can be determined with high precision down to 0.3 nm in a large range of 200 micrometers. Our work broadens the application scope of metasurface and paves the way for development of ultrasensitive optical 2D displacement metrology.
一种长距离、高精度且紧凑的横向位移计量技术在工业和科学研究中都至关重要。然而，要以埃级精度和百微米量程测量任意二维（2D）位移是一项巨大挑战。在此，我们展示了一种基于矩阵超表面的高精度二维位移计量原型。穿过超表面的光被衍射为水平（H）、垂直（V）和对角（D）线偏振的三束光。超表面相对于入射光束的二维横向位移是从H偏振和D偏振光束或V偏振和D偏振光束之间的相干叠加产生的干涉光功率中获取的。我们通过实验证明，在200微米的大范围内，可以高精度地确定二维平面中的任意位移，精度低至0.3纳米。我们的工作拓宽了超表面的应用范围，为超灵敏光学二维位移计量的发展铺平了道路。
