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基于氧化硅微孔阵列模板的具有双周期结构的碘化铯闪烁屏的制备与性能

Preparation and performance of a CsI scintillation screen with a double-period structure based on an oxidized silicon micropore array template.

作者信息

Teng Yunxue, Gu Mu, Sun Zhixiang, Liu Xiaolin, Liu Bo, Zhang Juannan, Huang Shiming, Ni Chen

出版信息

Opt Express. 2024 Jan 15;32(2):2732-2745. doi: 10.1364/OE.512075.

Abstract

A structured double-period CsI scintillation screen was successfully developed to improve its detection efficiency based on an oxidized silicon micropore array template with a period value on the order of micro-scale. The structure comprises a main structure along with a sub-structure. The main structure with a period of 8 µm was arranged in a square array consisting of square columnar scintillator units. The micropore walls between the main structure units were purposely fabricated from a SiO-Si-SiO layered structure. The pore walls in commonly used single-structure with a period of 4 µm use the same layered structure composition to obtain a fair comparison. The thickness of both Si and the SiO layers was around 0.4 µm. The unique feature of the double structure lies in the even separation of each unit within the main structure into four square columnar scintillator sub-units. These four sub-units within each sub-structure were isolated solely by SiO layers with a thickness of approximately 0.8 µm. As a result, the X-ray-induced optical luminescence intensity of the double-structure screen exhibited a 31% increase compared to the corresponding single-structure scintillation screen. In X-ray imaging, a spatial resolution of 109 lp/mm was achieved, which closely matched the results obtained with the single-structure CsI screen. Furthermore, the detective quantum efficiency also displayed a notable improvement.

摘要

基于具有微米级周期值的氧化硅微孔阵列模板,成功开发了一种结构化双周期碘化铯闪烁屏,以提高其探测效率。该结构包括一个主结构和一个子结构。周期为8 µm的主结构排列成由方形柱状闪烁体单元组成的方形阵列。主结构单元之间的微孔壁特意由SiO-Si-SiO层状结构制成。为了进行公平比较,常用的周期为4 µm的单结构中的孔壁使用相同的层状结构组成。硅层和SiO层的厚度均约为0.4 µm。双结构的独特之处在于主结构内的每个单元均匀地分隔为四个方形柱状闪烁体子单元。每个子结构内的这四个子单元仅由厚度约为0.8 µm的SiO层隔开。结果,与相应的单结构闪烁屏相比,双结构屏的X射线诱导光致发光强度提高了31%。在X射线成像中,实现了109 lp/mm的空间分辨率,这与单结构碘化铯屏获得的结果非常匹配。此外,探测量子效率也有显著提高。

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