Stone Dana M, Morgan Sarah E, Abdelmigeed Mai O, Nguyen Jimmy, Bennett Thomas D, Parsons Gregory N, Cowan Matthew G
Department of Chemical and Process Engineering, University of Canterbury, Christchurch, 8140, New Zealand.
Department of Chemical and Biomolecular Engineering, North Carolina State University, Raleigh, NC, 27606, USA.
Small. 2024 Jul;20(27):e2307202. doi: 10.1002/smll.202307202. Epub 2024 Feb 2.
Thin-films of metal-organic frameworks (MOFs) have widespread potential applications, especially with the emergence of glass-forming MOFs, which remove the inherent issue of grain boundaries and allow coherent amorphous films to be produced. Herein, it is established that atomic layer deposition (ALD) of zinc oxide lends excellent control over the thickness and localization of resultant polycrystalline and glass zeolitic imidazole framework-62 (ZIF-62) thin-films within tubular α-alumina supports. Through the reduction of the chamber pressure and dose times during zinc oxide deposition, the resultant ZIF-62 films are reduced from 38 µm to 16 µm, while the presence of sporadic ZIF-62 (previously forming as far as 280 µm into the support) is prevented. Furthermore, the glass transformation shows a secondary reduction in film thickness from 16 to 2 µm.
金属有机框架（MOF）薄膜具有广泛的潜在应用，尤其是随着玻璃形成型MOF的出现，消除了晶界的固有问题，并使得能够制备出连贯的非晶薄膜。在此，已证实氧化锌的原子层沉积（ALD）能够很好地控制所得多晶和玻璃态咪唑骨架-62（ZIF-62）薄膜在管状α-氧化铝载体中的厚度和定位。通过在氧化锌沉积过程中降低腔室压力和剂量时间，所得的ZIF-62薄膜厚度从38μm减小到16μm，同时防止了零星ZIF-62（以前在载体中形成深度可达280μm）的出现。此外，玻璃转变显示薄膜厚度从16μm进一步减小到2μm。
