Tromp Rudolf M
IBM T.J. Watson Research Center, 1101 Kitchawan Road, Yorktown Heights, NY 10598, USA.
Ultramicroscopy. 2024 May;259:113935. doi: 10.1016/j.ultramic.2024.113935. Epub 2024 Feb 6.
Energy-Dispersive X-Ray Spectroscopy (EDS) is a technique frequently used in Scanning and Transmission Electron Microscopes to study the elemental composition of a sample. Briefly, high energy electrons of the incident electron beam may ionize an electron from a core shell. The decay of this excited state may result in the emission of a characteristic X-ray photon or Auger-Meitner electron. A solid-state EDS detector captures the X-ray photon and determines its energy. The energy spectrum thus contains information on the elemental make-up of the sample. Low Energy Electron Microscopy (LEEM) typically utilizes incident electrons with energies in the range 0-100 eV, insufficient for the generation of elemental X-rays. In general, LEEM does therefore not allow for elemental characterization of the sample under study. Here we show how relatively simple modifications and additions to the LEEM instrument make in-situ EDS spectroscopy possible, and how high-quality EDS spectra can be obtained, thus enabling elemental analysis in LEEM instruments for the first time.
能量色散X射线光谱法（EDS）是一种常用于扫描电子显微镜和透射电子显微镜的技术，用于研究样品的元素组成。简而言之，入射电子束的高能电子可能会使核心壳层中的电子电离。这种激发态的衰变可能会导致特征X射线光子或俄歇-迈特纳电子的发射。固态EDS探测器捕获X射线光子并确定其能量。因此，能谱包含了样品元素组成的信息。低能电子显微镜（LEEM）通常使用能量在0-100 eV范围内的入射电子，这些能量不足以产生元素X射线。因此，一般来说，LEEM不允许对所研究的样品进行元素表征。在这里，我们展示了对LEEM仪器进行相对简单的修改和添加如何使原位EDS光谱分析成为可能，以及如何获得高质量的EDS光谱，从而首次在LEEM仪器中实现元素分析。
