Jeong Hyowon W, Ajay Akhil, Döblinger Markus, Sturm Sebastian, Gómez Ruiz Mikel, Zell Richard, Mukhundhan Nitin, Stelzner Daniel, Lähnemann Jonas, Müller-Caspary Knut, Finley Jonathan J, Koblmüller Gregor
Walter Schottky Institute, TUM School of Natural Sciences, Technical University of Munich, 85748 Garching bei München, Germany.
Department of Chemistry and Center for NanoScience, Ludwig-Maximilians-Universität München, 81377 Munich, Germany.
ACS Appl Nano Mater. 2024 Jan 24;7(3):3032-3041. doi: 10.1021/acsanm.3c05392. eCollection 2024 Feb 9.
III-V semiconductor nanowire (NW) heterostructures with axial InGaAs active regions hold large potential for diverse on-chip device applications, including site-selectively integrated quantum light sources, NW lasers with high material gain, as well as resonant tunneling diodes and avalanche photodiodes. Despite various promising efforts toward high-quality single or multiple axial InGaAs heterostacks using noncatalytic growth mechanisms, the important roles of facet-dependent shape evolution, crystal defects, and the applicability to more universal growth schemes have remained elusive. Here, we report the growth of optically active InGaAs axial NW heterostructures via completely catalyst-free, selective-area molecular beam epitaxy directly on silicon (Si) using GaAs(Sb) NW arrays as tunable, high-uniformity growth templates and highlight fundamental relationships between structural, morphological, and optical properties of the InGaAs region. Structural, compositional, and 3D-tomographic characterizations affirm the desired directional growth along the NW axis with no radial growth observed. Clearly distinct luminescence from the InGaAs active region is demonstrated, where tunable array-geometry parameters and In content up to 20% are further investigated. Based on the underlying twin-induced growth mode, we further describe the facet-dependent shape and interface evolution of the InGaAs segment and its direct correlation with emission energy.
具有轴向铟镓砷有源区的III-V族半导体纳米线(NW)异质结构在多种片上器件应用中具有巨大潜力,包括位点选择性集成量子光源、具有高材料增益的NW激光器,以及共振隧穿二极管和雪崩光电二极管。尽管人们为使用非催化生长机制获得高质量的单轴或多轴铟镓砷异质堆叠做出了各种有前景的努力,但面依赖形状演化、晶体缺陷的重要作用以及对更通用生长方案的适用性仍然难以捉摸。在此,我们报告了通过完全无催化剂的选择性区域分子束外延,直接在硅(Si)上生长光学活性铟镓砷轴向NW异质结构,使用砷化镓(锑)NW阵列作为可调谐、高均匀性的生长模板,并突出了铟镓砷区域的结构、形态和光学性质之间的基本关系。结构、成分和三维断层扫描表征证实了沿NW轴的期望定向生长,未观察到径向生长。展示了来自铟镓砷有源区的明显不同的发光,其中进一步研究了可调谐的阵列几何参数和高达20%的铟含量。基于潜在的孪晶诱导生长模式,我们进一步描述了铟镓砷段的面依赖形状和界面演化及其与发射能量的直接相关性。