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硅衬底绝缘体上的整体化 InGaAs 纳米线阵列激光器在室温下工作。

Monolithic InGaAs Nanowire Array Lasers on Silicon-on-Insulator Operating at Room Temperature.

机构信息

Department of Electrical Engineering, University of California, Los Angeles , Los Angeles, California 90095, United States.

School of Engineering, Cardiff University , Cardiff CF24 3AA, United Kingdom.

出版信息

Nano Lett. 2017 Jun 14;17(6):3465-3470. doi: 10.1021/acs.nanolett.7b00384. Epub 2017 May 25.

Abstract

Chip-scale integrated light sources are a crucial component in a broad range of photonics applications. III-V semiconductor nanowire emitters have gained attention as a fascinating approach due to their superior material properties, extremely compact size, and capability to grow directly on lattice-mismatched silicon substrates. Although there have been remarkable advances in nanowire-based emitters, their practical applications are still in the early stages due to the difficulties in integrating nanowire emitters with photonic integrated circuits. Here, we demonstrate for the first time optically pumped III-V nanowire array lasers monolithically integrated on silicon-on-insulator (SOI) platform. Selective-area growth of InGaAs/InGaP core/shell nanowires on an SOI substrate enables the nanowire array to form a photonic crystal nanobeam cavity with superior optical and structural properties, resulting in the laser to operate at room temperature. We also show that the nanowire array lasers are effectively coupled with SOI waveguides by employing nanoepitaxy on a prepatterned SOI platform. These results represent a new platform for ultracompact and energy-efficient optical links and unambiguously point the way toward practical and functional nanowire lasers.

摘要

芯片级集成光源是广泛的光子学应用中的关键组件。III-V 半导体纳米线发射器因其优异的材料特性、极其紧凑的尺寸以及能够直接在晶格失配的硅衬底上生长而备受关注,是一种引人注目的方法。尽管基于纳米线的发射器已经取得了显著的进展,但由于将纳米线发射器与光子集成电路集成的困难,它们的实际应用仍处于早期阶段。在这里,我们首次展示了在绝缘体上硅(SOI)平台上单片集成的光泵浦 III-V 纳米线阵列激光器。在 SOI 衬底上选择性区域生长 InGaAs/InGaP 核/壳纳米线,使纳米线阵列形成具有优异光学和结构性能的光子晶体纳米梁腔,从而使激光器在室温下工作。我们还表明,通过在预图案化的 SOI 平台上进行纳米外延,纳米线阵列激光器可以有效地与 SOI 波导耦合。这些结果代表了超紧凑和高能效光链路的新平台,并明确指出了实用和功能纳米线激光器的方向。

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