McKibben Nicholas, Ryel Blake, Manzi Jacob, Muramutsa Florent, Daw Joshua, Subbaraman Harish, Estrada David, Deng Zhangxian
Micron School of Materials Science and Engineering, Boise State University, 1910 W University Drive, Boise, ID 83725 USA.
Department of Mechanical and Biomedical Engineering, Boise State University, Boise, ID 83725 USA.
Microsyst Nanoeng. 2023 May 4;9:51. doi: 10.1038/s41378-023-00492-5. eCollection 2023.
Surface acoustic wave (SAW) devices are a subclass of micro-electromechanical systems (MEMS) that generate an acoustic emission when electrically stimulated. These transducers also work as detectors, converting surface strain into readable electrical signals. Physical properties of the generated SAW are material dependent and influenced by external factors like temperature. By monitoring temperature-dependent scattering parameters a SAW device can function as a thermometer to elucidate substrate temperature. Traditional fabrication of SAW sensors requires labor- and cost- intensive subtractive processes that produce large volumes of hazardous waste. This study utilizes an innovative aerosol jet printer to directly write consistent, high-resolution, silver comb electrodes onto a Y-cut LiNbO substrate. The printed, two-port, 20 MHz SAW sensor exhibited excellent linearity and repeatability while being verified as a thermometer from 25 to 200 C. Sensitivities of the printed SAW thermometer are C and C when operating in pulse-echo mode and pulse-receiver mode, respectively. These results highlight a repeatable path to the additive fabrication of compact high-frequency SAW thermometers.
表面声波（SAW）器件是微机电系统（MEMS）的一个子类，在受到电刺激时会产生声发射。这些换能器也可作为探测器，将表面应变转换为可读的电信号。所产生的表面声波的物理特性取决于材料，并受温度等外部因素影响。通过监测与温度相关的散射参数，SAW器件可作为温度计来测定衬底温度。传统的SAW传感器制造需要耗费大量人力和成本的减法工艺，会产生大量危险废物。本研究利用一种创新的气溶胶喷射打印机，直接在Y切割的LiNbO衬底上打印出一致、高分辨率的银梳状电极。打印出的双端口20MHz SAW传感器表现出优异的线性度和重复性，同时在25至200摄氏度范围内被验证为温度计。打印的SAW温度计在脉冲回波模式和脉冲接收模式下工作时的灵敏度分别为摄氏度和摄氏度。这些结果突出了一条可重复的路径，用于紧凑高频SAW温度计的增材制造。
