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通过拉曼光谱法测定畴尺寸远小于激光光斑尺寸的MoS薄膜的平均厚度和特定层的表面覆盖率。

Determining by Raman spectroscopy the average thickness and -layer-specific surface coverages of MoS thin films with domains much smaller than the laser spot size.

作者信息

Wasem Klein Felipe, Huntzinger Jean-Roch, Astié Vincent, Voiry Damien, Parret Romain, Makhlouf Houssine, Juillaguet Sandrine, Decams Jean-Manuel, Contreras Sylvie, Landois Périne, Zahab Ahmed-Azmi, Sauvajol Jean-Louis, Paillet Matthieu

机构信息

Laboratoire Charles Coulomb, Université de Montpellier, CNRS, F-34095, Montpellier, France.

Annealsys, 139 Rue des Walkyries, 34000 Montpellier, France.

出版信息

Beilstein J Nanotechnol. 2024 Mar 7;15:279-296. doi: 10.3762/bjnano.15.26. eCollection 2024.

Abstract

Raman spectroscopy is a widely used technique to characterize nanomaterials because of its convenience, non-destructiveness, and sensitivity to materials change. The primary purpose of this work is to determine via Raman spectroscopy the average thickness of MoS thin films synthesized by direct liquid injection pulsed-pressure chemical vapor deposition (DLI-PP-CVD). Such samples are constituted of nanoflakes (with a lateral size of typically 50 nm, i.e., well below the laser spot size), with possibly a distribution of thicknesses and twist angles between stacked layers. As an essential preliminary, we first reassess the applicability of different Raman criteria to determine the thicknesses (or layer number, ) of MoS flakes from measurements performed on reference samples, namely well-characterized mechanically exfoliated or standard chemical vapor deposition MoS large flakes deposited on 90 ± 6 nm SiO on Si substrates. Then, we discuss the applicability of the same criteria for significantly different DLI-PP-CVD MoS samples with average thicknesses ranging from sub-monolayer up to three layers. Finally, an original procedure based on the measurement of the intensity of the layer breathing modes is proposed to evaluate the surface coverage for each (i.e., the ratio between the surface covered by exactly layers and the total surface) in DLI-PP-CVD MoS samples.

摘要

拉曼光谱法是一种广泛应用于表征纳米材料的技术,因其具有便捷性、无损性以及对材料变化的敏感性。这项工作的主要目的是通过拉曼光谱法确定采用直接液体注入脉冲压力化学气相沉积法(DLI-PP-CVD)合成的MoS薄膜的平均厚度。此类样品由纳米薄片组成(横向尺寸通常为50纳米,即远低于激光光斑尺寸),堆叠层之间可能存在厚度和扭转角的分布。作为一项重要的前期工作,我们首先重新评估不同拉曼标准在确定MoS薄片厚度(或层数)方面的适用性,这些评估是基于对参考样品的测量,即在硅衬底上90±6纳米厚的二氧化硅上沉积的、经过充分表征的机械剥离或标准化学气相沉积的MoS大薄片。然后,我们讨论相同标准对平均厚度从亚单层到三层的显著不同的DLI-PP-CVD MoS样品的适用性。最后,提出了一种基于层呼吸模式强度测量的原始方法,用于评估DLI-PP-CVD MoS样品中每层的表面覆盖率(即恰好由 层覆盖的表面与总表面的比率)。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c08c/10928926/46ae8c9c36ef/Beilstein_J_Nanotechnol-15-279-g002.jpg

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