Lin Tai-Nan, Liao Pin-Hsun, Wang Cheng-Chin, Lee Hung-Bin, Tsay Leu-Wen
Department of Material Research, National Atomic Research Institute, Taoyuan 32546, Taiwan.
Department of Optoelectronics and Materials Technology, National Taiwan Ocean University, Keelung 20224, Taiwan.
Materials (Basel). 2024 Apr 28;17(9):2071. doi: 10.3390/ma17092071.
Amorphous thin films can be applied to increase the anti-corrosion ability of critical components. Atomized FeCrNiMoCSiB powders were hot-pressed into a disc target for R. F. magnetron sputtering on a 316L substrate to upgrade its corrosion resistance. The XRD spectrum confirmed that the film deposited by R. F. magnetron sputtering was amorphous. The corrosion resistance of the amorphous film was evaluated in a 1 M HCl solution with potentiodynamic polarization tests, and the results were contrasted with those of a high-velocity oxy-fuel (HVOF) coating and 316L, IN 600, and C 276 alloys. The results indicated that the film hardness and elastic modulus, as measured using a nanoindenter, were 11.1 and 182 GPa, respectively. The principal stresses in two normal directions of the amorphous film were about 60 MPa and in tension. The corrosion resistance of the amorphous film was much greater than that of the other samples, which showed a broad passivation region, even in a 1 M HCl solution. Although the amorphous film showed high corrosion resistance, the original pinholes in the film were weak sites to initiate corrosion pits. After polarization tests, large, deep trenches were seen in the corroded 316L substrate; numerous fine patches in the IN 600 alloy and grain boundary corrosion in the C276 alloy were observed.
非晶态薄膜可用于提高关键部件的抗腐蚀能力。将雾化的FeCrNiMoCSiB粉末热压成圆盘靶材，用于在316L基体上进行射频磁控溅射，以提升其耐腐蚀性。X射线衍射光谱证实，通过射频磁控溅射沉积的薄膜为非晶态。采用动电位极化试验在1 M HCl溶液中评估非晶态薄膜的耐腐蚀性，并将结果与高速氧燃料（HVOF）涂层以及316L、IN 600和C 276合金的结果进行对比。结果表明，使用纳米压痕仪测得的薄膜硬度和弹性模量分别为11.1 GPa和182 GPa。非晶态薄膜两个垂直方向的主应力约为60 MPa，且为拉应力。非晶态薄膜的耐腐蚀性远高于其他样品，即使在1 M HCl溶液中也显示出较宽的钝化区。尽管非晶态薄膜表现出高耐腐蚀性，但薄膜中原有的针孔是引发腐蚀坑的薄弱部位。极化试验后，在腐蚀后的316L基体上可见大而深的沟槽；在IN 600合金中观察到大量细小斑点，在C276合金中观察到晶间腐蚀。
