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半导体器件输运模拟中自洽薛定谔-泊松方程收敛性的数值研究。

Numerical investigation on the convergence of self-consistent Schrödinger-Poisson equations in semiconductor device transport simulation.

作者信息

Zhu Junyan, Cao Jiang, Song Chen, Li Bo, Han Zhengsheng

机构信息

Institute of Microelectronics of the Chinese Academy of Sciences, Beijing, 100029, People's Republic of China.

University of Chinese Academy of Sciences, Beijing, 100049, People's Republic of China.

出版信息

Nanotechnology. 2024 May 17;35(31). doi: 10.1088/1361-6528/ad4558.

DOI:10.1088/1361-6528/ad4558
PMID:38764182
Abstract

Semiconductor devices at the nanoscale with low-dimensional materials as channels exhibit quantum transport characteristics, thereby their electrical simulation relies on the self-consistent solution of the Schrödinger-Poisson equations. While the non-equilibrium Green's function (NEGF) method is widely used for solving this quantum many-body problem, its high computational cost and convergence challenges with the Poisson equation significantly limit its applicability. In this study, we investigate the stability of the NEGF method coupled with various forms of the Poisson equation, encompassing linear, analytical nonlinear, and numerical nonlinear forms Our focus lies on simulating carbon nanotube field-effect transistors (CNTFETs) under two distinct doping scenarios: electrostatic doping and ion implantation doping. The numerical experiments reveal that nonlinear formulas outperform linear counterpart. The numerical one demonstrates superior stability, particularly evident under high bias and ion implantation doping conditions. Additionally, we investigate different approaches for presolving potential, leveraging solutions from the Laplace equation and a piecewise guessing method tailored to each doping mode. These methods effectively reduce the number of iterations required for convergence.

摘要

以低维材料为沟道的纳米级半导体器件表现出量子输运特性,因此其电学模拟依赖于薛定谔 - 泊松方程的自洽解。虽然非平衡格林函数(NEGF)方法被广泛用于解决这个量子多体问题,但其高计算成本以及与泊松方程相关的收敛挑战显著限制了其适用性。在本研究中,我们研究了与各种形式的泊松方程(包括线性、解析非线性和数值非线性形式)耦合的NEGF方法的稳定性。我们的重点是在两种不同的掺杂情况下模拟碳纳米管场效应晶体管(CNTFET):静电掺杂和离子注入掺杂。数值实验表明,非线性公式优于线性公式。数值方法表现出卓越的稳定性,在高偏置和离子注入掺杂条件下尤为明显。此外,我们研究了预求解电势的不同方法,利用拉普拉斯方程的解以及针对每种掺杂模式定制的分段猜测方法。这些方法有效地减少了收敛所需的迭代次数。

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