Miller Forrest, Chen Rui, Fröch Johannes, Fang Zhuoran, Tara Virat, Geiger Sarah, Majumdar Arka
Department of Electrical and Computer Engineering, University of Washington, 185 E. Stevens Way NE, Seattle, Washington 98195, United States.
Draper Scholar, The Charles Stark Draper Laboratory, 555 Technology Square, Cambridge, Massachusetts 02139, United States.
Nano Lett. 2024 Jun 12;24(23):6844-6849. doi: 10.1021/acs.nanolett.4c00070. Epub 2024 May 28.
Programmable photonic integrated circuits (PICs) are an increasingly important platform in optical science and engineering. However, current programmable PICs are mostly formed through subtractive fabrication techniques, which limits the reconfigurability of the device and makes prototyping costly and time-consuming. A rewritable PIC architecture can circumvent these drawbacks, where PICs are repeatedly written and erased on a single PIC canvas. We demonstrate such a rewritable PIC platform by selective laser writing a layer of wide-band-gap phase change material (PCM) SbS with a low-cost benchtop setup. We show arbitrary patterning with resolution up to 300 nm and write dielectric assisted waveguides with a low optical loss of 0.0172 dB/μm. We envision that using this inexpensive benchtop platform thousands of PIC designs can be written, tested, and erased on the same chip without the need for lithography/etching tools or a nanofabrication facility, thus reducing manufacturing cost and increasing accessibility.
可编程光子集成电路(PIC)在光学科学与工程领域正日益成为一个重要的平台。然而,当前的可编程PIC大多通过减法制造技术形成,这限制了器件的可重构性,使得原型制作成本高昂且耗时。一种可重写的PIC架构可以规避这些缺点,即在单个PIC画布上对PIC进行反复写入和擦除。我们通过使用低成本的台式装置选择性激光写入一层宽带隙相变材料(PCM)硫化锑(SbS)来展示这样一个可重写的PIC平台。我们展示了分辨率高达300纳米的任意图案化,并写入了具有0.0172分贝/微米低光学损耗的介质辅助波导。我们设想,使用这个廉价的台式平台,可以在同一芯片上写入、测试和擦除数千种PIC设计,而无需光刻/蚀刻工具或纳米制造设施,从而降低制造成本并提高可及性。