用于彩色共焦测量系统的混合衍射折射透镜。

Hybrid diffractive-refractive lens for chromatic confocal measurement system.

作者信息

Wang Yulong, Li Jie, Hou Xi, Chen Lin, Liu Xin, Yang Jie, Zheng Yidi

出版信息

Opt Express. 2024 May 20;32(11):20128-20135. doi: 10.1364/OE.525475.

Abstract

A novel chromatic confocal measurement (CCM) method using a hybrid diffractive- refractive lens is presented. This hybrid diffractive- refractive lens is designed to optimize the linearity of chromatic dispersion and minimize the size of the optical system. The hybrid diffractive- refractive lens is fabricated by etching a diffractive surface onto a quartz aspheric lens through lithography, which combines the high numerical aperture (NA) of a refractive lens with the unique dispersion properties of the diffractive optical elements (DOE). The lens is incorporated as a dispersive objective lens in a CCM experimental system. The system has a measurement range of 514.8 µm, calibrated using a laser displacement interferometer. The experimental results show that the wavelength-to-axial position coding of the CCM system achieves high linearity (R= 0.9999) in the working wavelength range (500-700 nm). The system has an axial resolution of 0.08 µm and a displacement measurement nonlinear error of less than 2.05 µm.

摘要

提出了一种使用混合衍射折射透镜的新型彩色共焦测量（CCM）方法。这种混合衍射折射透镜旨在优化色散的线性度并最小化光学系统的尺寸。该混合衍射折射透镜是通过光刻在石英非球面透镜上蚀刻衍射表面制成的，它将折射透镜的高数值孔径（NA）与衍射光学元件（DOE）独特的色散特性相结合。该透镜被用作CCM实验系统中的色散物镜。该系统的测量范围为514.8 µm，使用激光位移干涉仪进行校准。实验结果表明，CCM系统的波长到轴向位置编码在工作波长范围（500 - 700 nm）内实现了高线性度（R = 0.9999）。该系统的轴向分辨率为0.08 µm，位移测量非线性误差小于2.05 µm。