A Soft Inductive Bimodal Sensor for Proprioception and Tactile Sensing of Soft Machines.

The somatosensory system is crucial for living beings to survive and thrive in complex environments and to interact with their surroundings. Similarly, rapidly developed soft robots need to be aware of their own posture and detect external stimuli. Bending and force sensing are key for soft machines to achieve embodied intelligence. Here, we present a soft inductive bimodal sensor (SIBS) that uses the strain modulation of magnetic permeability and the eddy-current effect for simultaneous bidirectional bending and force sensing with only two wires. The SIBS is made of a flexible planar coil, a porous ferrite film, and a soft conductive film. By measuring the inductance at two different frequencies, the bending angle and force can be obtained and decoupled. Rigorous experiments revealed that the SIBS can achieve high resolution (0.44° bending and 1.09 mN force), rapid response, excellent repeatability, and high durability. A soft crawling robot embedded with one SIBS can sense its own shape and interact with and respond to external stimuli. Moreover, the SIBS is demonstrated as a wearable human-machine interaction to control a crawling robot via wrist bending and touching. This highlights that the SIBS can be readily implemented in diverse applications for reliable bimodal sensing.