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氢等离子体处理对溶液法制备的ZnO薄膜电学性能的影响。

Effects of Hydrogen Plasma Treatment on the Electrical Behavior of Solution-Processed ZnO Thin Films.

作者信息

Park Ji-In, Lee Hyun Uk, Pearson Christopher, Petty Michael C, Jeong Yesul

机构信息

Research Center for Materials Analysis, Korea Basic Science Institute (KBSI), Daejeon 34133, Republic of Korea.

School of Engineering and Computing Sciences and Centre for Molecular and Nanoscale Electronics, Durham University, South Road, Durham DH1 3LE, UK.

出版信息

Materials (Basel). 2024 Jun 1;17(11):2673. doi: 10.3390/ma17112673.

DOI:10.3390/ma17112673
PMID:38893937
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11173724/
Abstract

In this study, the effect of atmospheric hydrogen plasma treatment on the in-plane conductivity of solution-processed zinc oxide (ZnO) in various environments is reported. The hydrogen-plasma-treated and untreated ZnO films exhibited ohmic behavior with room-temperature in-plane conductivity in a vacuum. When the untreated ZnO film was exposed to a dry oxygen environment, the conductivity rapidly decreased, and an oscillating current was observed. In certain cases, the thin film reversibly 'switched' between the high- and low-conductivity states. In contrast, the conductivity of the hydrogen-plasma-treated ZnO film remained nearly constant under different ambient conditions. We infer that hydrogen acts as a shallow donor, increasing the carrier concentration and generating oxygen vacancies by eliminating the surface contamination layer. Hence, atmospheric hydrogen plasma treatment could play a crucial role in stabilizing the conductivity of ZnO films.

摘要

在本研究中，报道了大气氢等离子体处理对溶液法制备的氧化锌（ZnO）在各种环境中的面内电导率的影响。氢等离子体处理和未处理的ZnO薄膜在真空中表现出欧姆行为，具有室温面内电导率。当未处理的ZnO薄膜暴露在干燥氧气环境中时，电导率迅速下降，并观察到振荡电流。在某些情况下，薄膜在高电导率和低电导率状态之间可逆地“切换”。相比之下，氢等离子体处理的ZnO薄膜在不同环境条件下电导率几乎保持恒定。我们推断氢作为浅施主，通过消除表面污染层增加载流子浓度并产生氧空位。因此，大气氢等离子体处理在稳定ZnO薄膜的电导率方面可能起着关键作用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/0afd7f0bbf76/materials-17-02673-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/11ef4aa70419/materials-17-02673-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/ee8c364de531/materials-17-02673-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/1c496f9e623f/materials-17-02673-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/45c75f1c10b1/materials-17-02673-g004a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/3fc552dcc00b/materials-17-02673-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/c349c82aa53e/materials-17-02673-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/6c38665ec990/materials-17-02673-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/8f510b0dd8f9/materials-17-02673-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/5493bc04123f/materials-17-02673-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/0afd7f0bbf76/materials-17-02673-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/11ef4aa70419/materials-17-02673-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/ee8c364de531/materials-17-02673-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/1c496f9e623f/materials-17-02673-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/45c75f1c10b1/materials-17-02673-g004a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/3fc552dcc00b/materials-17-02673-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/c349c82aa53e/materials-17-02673-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/6c38665ec990/materials-17-02673-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/8f510b0dd8f9/materials-17-02673-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/5493bc04123f/materials-17-02673-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a62b/11173724/0afd7f0bbf76/materials-17-02673-g010.jpg

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