School of Materials and Engineering, Zhejiang University, Hangzhou, 310027, China.
Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou, 310024, China.
Small Methods. 2024 Oct;8(10):e2400781. doi: 10.1002/smtd.202400781. Epub 2024 Jul 6.
Wearable sensors designed for continuous, non-invasive monitoring of physicochemical signals are important for portable healthcare. Oxide field-effect transistor (FET)-type biosensors provide high sensitivity and scalability. However, they face challenges in mechanical flexibility, multiplexed sensing of different modules, and the absence of integrated on-site signal processing and wireless transmission functionalities for wearable sensing. In this work, a fully integrated wearable oxide FET-based biosensor array is developed to facilitate the multiplexed and simultaneous measurement of ion concentrations (H, Na, K) and temperature. The FET-sensor array is achieved by utilizing a solution-processed ultrathin (≈6 nm thick) InO active channel layer, exhibiting high compatibility with standard semiconductor technology, good mechanical flexibility, high uniformity, and low operational voltage of 0.005 V. This work provides an effective method to enable oxide FET-based biosensors for the fusion of multiplexed physicochemical information and wearable health monitoring applications.
用于连续、非侵入式物理化学信号监测的可穿戴传感器对于便携式医疗保健至关重要。氧化物场效应晶体管 (FET) 型生物传感器具有高灵敏度和可扩展性。然而，它们在机械灵活性、不同模块的多路复用传感以及缺乏集成的现场信号处理和无线传输功能方面面临挑战，这些功能对于可穿戴传感至关重要。在这项工作中，开发了一种完全集成的基于氧化物 FET 的可穿戴生物传感器阵列，以促进离子浓度（H、Na、K）和温度的多路复用和同时测量。FET 传感器阵列通过利用溶液处理的超薄（≈6nm 厚）InO 有源通道层来实现，该方法与标准半导体技术具有高兼容性、良好的机械灵活性、高均匀性和低工作电压（0.005V）。这项工作为基于氧化物 FET 的生物传感器提供了一种有效的方法，使其能够融合多路复用的物理化学信息和可穿戴健康监测应用。
