Li Peixing, Chen Yunzhuang, Xie Chao, Xu Zhihao, Lai Leijie, Zhu Limin
School of Mechanical and Automotive Engineering, Shanghai University of Engineering Science, Shanghai 201620, China.
State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
Rev Sci Instrum. 2024 Jul 1;95(7). doi: 10.1063/5.0203529.
In this paper, a long-stroke parallel compliant tip-tilt-piston micropositioning stage driven by voice coil motors (VCMs) is proposed. The stage is equipped with three sets of driving arms, which include a spherical hinge, VCM, and parallelogram guide mechanism, evenly spaced at 120° intervals. The spherical hinge is composed of orthogonal leaf-spring beams, and the VCM is embedded into the parallelogram mechanism to form a compact design. The compliance matrix method and the geometric method facilitated the determination of compliance in all six degree-of-freedom directions of the spherical hinge and the derivation of kinematic equations for decoupling the motion of the stage. In addition, finite element analysis was utilized to determine the maximum stroke and stress of the stage. To validate the proposed design, a stage prototype was constructed and subjected to experimental testing. Furthermore, a feedback controller was designed, integrating proportional integral controller, notch filter, and sliding mode controller feedforward. The experimental results indicate that the stage can achieve a long stroke of ±50.75 mrad × ±44.2 mrad × ±4.425 mm, with the natural frequencies in the three-axis direction of 22.3 × 25.5 × 25.5 Hz3. In addition, the maximum relative tracking error was maintained below 5.25%, highlighting the effectiveness of the control technique in achieving a high tracking performance.
本文提出了一种由音圈电机（VCM）驱动的长行程并联柔性倾摆-活塞微定位平台。该平台配备有三组驱动臂，包括一个球形铰链、音圈电机和平行四边形导向机构，它们以120°的间隔均匀分布。球形铰链由正交的片簧梁组成，音圈电机嵌入平行四边形机构中以形成紧凑的设计。柔度矩阵法和几何方法有助于确定球形铰链在所有六个自由度方向上的柔度，并推导用于解耦平台运动的运动学方程。此外，利用有限元分析来确定平台的最大行程和应力。为了验证所提出的设计，构建了一个平台原型并进行了实验测试。此外，设计了一种反馈控制器，集成了比例积分控制器、陷波滤波器和滑模控制器前馈。实验结果表明，该平台可实现±50.75 mrad×±44.2 mrad×±4.425 mm的长行程，在三个轴向上的固有频率为22.3×25.5×25.5 Hz3。此外，最大相对跟踪误差保持在5.25%以下，突出了控制技术在实现高跟踪性能方面的有效性。
