School of Mechanical and Automotive Engineering, Shanghai University of Engineering Science, Shanghai 201600, China.
State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
Rev Sci Instrum. 2023 Mar 1;94(3):035012. doi: 10.1063/5.0133906.
This paper aims at presenting a solution to overcome the problems of small driving force and the evident nonlinear characteristics of the large stroke flexure-based micropositioning stage driven by a voice coil motor (VCM). The push-pull mode of complementary configurations of VCMs on both sides is adopted to improve the magnitude and uniformity of the driving force, and model-free adaptive control (MFAC) is combined to achieve accurate control of the positioning stage. First, the micropositioning stage based on the compound double parallelogram flexure mechanism driven by double VCMs in the push-pull mode is proposed, and its most prominent features are introduced. Then, a comparison of the driving force characteristics of a single VCM and dual VCMs is conducted, and the results are empirically discussed. Subsequently, the static and dynamic modeling of the flexure mechanism was carried out and verified by finite element analysis and experimental tests. After that, the controller for the positioning stage based on MFAC is designed. Finally, three different combinations of different controllers and VCM configuration modes are used to track the triangle wave signals. The experimental results show that compared with the other two combinations, the maximum tracking error and root mean square error of the combination of MFAC and push-pull mode are significantly reduced, which fully proves the effectiveness and feasibility of the method proposed in this paper. At the same time, the reduction of current in the coil confirms the advantages of the push-pull mode.
本文旨在提出一种解决方案，以克服由音圈电机（VCM）驱动的大行程基于弯曲的微定位台驱动力小和明显的非线性特点的问题。采用两侧 VCM 的互补配置的推挽模式来提高驱动力的大小和均匀性，并结合无模型自适应控制（MFAC）实现定位台的精确控制。首先，提出了基于复合双平行四边形弯曲机构的微定位台，介绍了其最显著的特点。然后，对单 VCM 和双 VCM 的驱动力特性进行了比较，并对结果进行了实证讨论。随后，对弯曲机构进行了静态和动态建模，并通过有限元分析和实验测试进行了验证。之后，设计了基于 MFAC 的定位台控制器。最后，使用三种不同的控制器和 VCM 配置模式的组合来跟踪三角波信号。实验结果表明，与其他两种组合相比，MFAC 和推挽模式组合的最大跟踪误差和均方根误差显著降低，充分证明了本文提出的方法的有效性和可行性。同时，线圈电流的降低证实了推挽模式的优势。
