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用于基于工具制造的熔融石英玻璃和非晶态金属的亚微米复制

Sub-Micron Replication of Fused Silica Glass and Amorphous Metals for Tool-Based Manufacturing.

作者信息

Kluck Sebastian, Prediger Richard, Hambitzer Leonhard, Nekoonam Niloofar, Dreher Franziska, Luitz Manuel, Lunzer Markus, Worgull Matthias, Schneider Marc, Rapp Bastian E, Kotz-Helmer Frederik

机构信息

Laboratory of Process Technology, NeptunLab, Department of Microsystems Engineering (IMTEK), University of Freiburg, 79108, Freiburg im Breisgau, Germany.

UpNano GmbH, Modecenterstrasse 22/D36, Vienna, 1030, Austria.

出版信息

Adv Sci (Weinh). 2024 Sep;11(35):e2405320. doi: 10.1002/advs.202405320. Epub 2024 Jul 12.

Abstract

The growing importance of submicrometer-structured surfaces across a variety of different fields has driven progress in light manipulation, color diversity, water-repellency, and functional enhancements. To enable mass production, processes like hot-embossing (HE), roll-to-roll replication (R2R), and injection molding (IM) are essential due to their precision and material flexibility. However, these processes are tool-based manufacturing (TBM) techniques requiring metal molds, which are time-consuming and expensive to manufacture, as they mostly rely on galvanoforming using templates made via precision microlithography or two-photon-polymerization (2PP). In this work, a novel approach is demonstrated to replicate amorphous metals from fused silica glass, derived from additive manufacturing and structured using hot embossing and casting, enabling the fabrication of metal insets with features in the range of 300 nm and a surface roughness of below 10 nm. By partially crystallizing the amorphous metal, during the replication process, the insets gain a high hardness of up to 800 HV. The metal molds are successfully used in polymer injection molding using different polymers including polystyrene (PS) and polyethylene (PE) as well as glass nanocomposites. This work is of significant importance to the field as it provides a production method for the increasing demand for sub-micron-structured tooling in the area of polymer replication while substantially reducing their cost of production.

摘要

亚微米结构表面在各种不同领域的重要性日益增加,推动了光操纵、颜色多样性、防水性和功能增强等方面的进展。为了实现大规模生产,热压印(HE)、卷对卷复制(R2R)和注塑成型(IM)等工艺至关重要,因为它们具有精度高和材料灵活性强的特点。然而,这些工艺都是基于工具的制造(TBM)技术,需要金属模具,而金属模具制造耗时且昂贵,因为它们大多依赖于使用通过精密微光刻或双光子聚合(2PP)制成的模板进行电铸成型。在这项工作中,展示了一种新颖的方法,可从熔融石英玻璃复制非晶态金属,该玻璃源自增材制造,并通过热压印和铸造进行结构化处理,从而能够制造出特征尺寸在300纳米范围内且表面粗糙度低于10纳米的金属镶嵌件。在复制过程中,通过使非晶态金属部分结晶,镶嵌件获得了高达800 HV的高硬度。这些金属模具已成功应用于使用不同聚合物(包括聚苯乙烯(PS)和聚乙烯(PE))以及玻璃纳米复合材料的聚合物注塑成型中。这项工作对该领域具有重要意义,因为它为聚合物复制领域对亚微米结构模具日益增长的需求提供了一种生产方法,同时大幅降低了其生产成本。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7b41/11425202/3b21b22396ab/ADVS-11-2405320-g005.jpg

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