You Tenghui, Dai Yanmeng, Yu Jian, Ye Hai-Xian, Dai Wan-Jun, Cao Lei-Feng
Shenzhen Key Laboratory of Ultraintense Laser and Advanced Material Technology, Center for Intense Laser Application Technology, and College of Engineering Physics, Shenzhen Technology University, Shenzhen, China.
College of Applied Sciences, Shenzhen University, Shenzhen, China.
Microsc Res Tech. 2024 Dec;87(12):2850-2861. doi: 10.1002/jemt.24652. Epub 2024 Jul 19.
This study employed multifractal analysis to investigate the changes in surface morphology of SiO anti-reflective coatings prepared on KDP substrates using the sol-gel method, under various conditions of ultraviolet (UV) irradiance. The coatings were successfully fabricated, and the chemical structure of the SiO sol was comprehensively characterized using Solid-State Nuclear Magnetic Resonance (SSNMR) technology. Under low UV irradiance (4 J/cm), repeated experiments revealed a crack-induced mechanism of surface fatigue damage. Utilizing Scanning Electron Microscopy (SEM), the study discovered the induction effect of initial crack defects in UV-damaged coatings and established a damage model. Furthermore, Atomic Force Microscopy (AFM) was used to acquire images of the coatings' surface morphology at different damage levels, which were analyzed using the multifractal spectrum f(α). This analysis confirmed the multifractal nature of the coatings both before and after damage. This study identified significant effects of UV irradiation on the width of the multifractal spectrum and Δf, indicating that the SiO anti-reflective coatings exhibit multifractal characteristics under various damage states. The coatings displayed a pattern of decreasing and then increasing singularity spectrum width, height distribution unevenness, and surface roughness with increasing damage. This study demonstrates that multifractal analysis is an effective tool for describing the complexity of the surface morphology of sol-gel-derived anti-reflective coatings for the first time and for validating their multifractal properties across different stages of UV damage. HIGHLIGHTS: Damage dynamic process of KDP crystal sol-gel coating was described by SEM&AFM; The crack propagation mechanism of sol-gel coating under UV radiation is proposed; The damage evolution of sol-gel coating was described by multifractal analysis.
本研究采用多重分形分析方法,研究了在不同紫外(UV)辐照条件下,利用溶胶 - 凝胶法在KDP衬底上制备的SiO减反射涂层表面形貌的变化。成功制备了涂层,并使用固体核磁共振(SSNMR)技术对SiO溶胶的化学结构进行了全面表征。在低UV辐照(4 J/cm)下,重复实验揭示了表面疲劳损伤的裂纹诱导机制。利用扫描电子显微镜(SEM),该研究发现了UV损伤涂层中初始裂纹缺陷的诱导效应,并建立了损伤模型。此外,使用原子力显微镜(AFM)获取了不同损伤程度下涂层表面形貌的图像,并利用多重分形谱f(α)对其进行了分析。该分析证实了涂层在损伤前后均具有多重分形性质。本研究确定了UV辐照对多重分形谱宽度和Δf有显著影响,表明SiO减反射涂层在各种损伤状态下均表现出多重分形特征。随着损伤程度的增加,涂层的奇异性谱宽度、高度分布不均匀性和表面粗糙度呈现出先减小后增加的模式。本研究首次证明多重分形分析是描述溶胶 - 凝胶衍生减反射涂层表面形貌复杂性以及验证其在UV损伤不同阶段多重分形性质的有效工具。亮点:通过SEM和AFM描述了KDP晶体溶胶 - 凝胶涂层的损伤动态过程;提出了溶胶 - 凝胶涂层在UV辐射下的裂纹扩展机制;用多重分形分析描述了溶胶 - 凝胶涂层的损伤演化。