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喷雾沉积法制备新型纳米结构WO薄膜的拉曼研究

Raman Study of Novel Nanostructured WO Thin Films Grown by Spray Deposition.

作者信息

Popescu Andreea Gabriela Marina, Tudose Ioan Valentin, Romanitan Cosmin, Popescu Marian, Manica Marina, Schiopu Paul, Vladescu Marian, Suchea Mirela Petruta, Pachiu Cristina

机构信息

National Institute for Research and Development in Microtechnologies-IMT Bucharest, 126A, Erou Iancu Nicolae Street, 077190 Voluntari, Romania.

Doctoral School of Electronics, Telecommunications and Information Technology, National University of Science and Technology POLITEHNICA Bucharest, 061071 Bucharest, Romania.

出版信息

Nanomaterials (Basel). 2024 Jul 19;14(14):1227. doi: 10.3390/nano14141227.

Abstract

The present communication reports on the effect of the sprayed solution volume variation (as a thickness variation element) on the detailed Raman spectroscopy for WO thin films with different thicknesses grown from precursor solutions with two different concentrations. Walls-like structured monoclinic WO thin films were obtained by the spray deposition method for further integration in gas sensors. A detailed analysis of the two series of samples shows that the increase in thickness strongly affects the films' morphology, while their crystalline structure is only slightly affected. The Raman analysis contributes to refining the structural feature clarifications. It was observed that, for 0.05 M precursor concentration series, thinner films (lower volume) show less intense peaks, indicating more defects and lower crystallinity, while thicker films (higher volume) exhibit sharper and more intense peaks, suggesting improved crystallinity and structural order. For higher precursor concentration 0.1 M series, films at higher precursor concentrations show overall more intense and sharper peaks across all thicknesses, indicating higher crystallinity and fewer defects. Differences in peak intensity and presence reflect variations in film morphology and structural properties due to increased precursor concentration. Further studies are ongoing.

摘要

本通讯报道了喷雾溶液体积变化(作为厚度变化因素)对由两种不同浓度前驱体溶液生长的不同厚度WO薄膜的详细拉曼光谱的影响。通过喷雾沉积法获得了壁状结构的单斜WO薄膜,以便进一步集成到气体传感器中。对这两组样品的详细分析表明,厚度的增加强烈影响薄膜的形态,而其晶体结构仅受到轻微影响。拉曼分析有助于完善结构特征的阐释。观察到,对于0.05 M前驱体浓度系列,较薄的薄膜(较低体积)显示出较弱的峰,表明缺陷较多且结晶度较低,而较厚的薄膜(较高体积)呈现出更尖锐、更强的峰,表明结晶度提高且结构有序。对于较高前驱体浓度0.1 M系列,在所有厚度下,较高前驱体浓度的薄膜总体上显示出更强、更尖锐的峰,表明结晶度更高且缺陷更少。峰强度和存在情况的差异反映了由于前驱体浓度增加导致的薄膜形态和结构性质的变化。进一步的研究正在进行中。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b1e1/11279887/ce25928b0023/nanomaterials-14-01227-g001.jpg

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