High Volatile Antimony(III) Precursors for Metal Oxide Thin Film Deposition.

We report the synthesis and characterization of novel antimony(III) complexes: Sb(mpa) (), Sb(mmpa) (), Sb(mdpa) (), Sb(epa) (), Sb(empa) (), and Sb(edpa) () (mpa = -methoxypropanamide, mmpa = -methoxy-2-methyl-propanamide, mdpa = -methoxy-2,2-dimethylpropanamide, epa = -ethoxypropanamide, empa = -ethoxy-2-methylpropanamide, and edpa = -ethoxy-2,2-dimethylpropanamide, via a salt-elimination reaction with SbCl and sodium-substituted carboxamide. The molecular structure of revealed the formation of a homoleptic conformer with a highly distorted pentagonal bipyramidal geometry, as determined by X-ray crystallography. Thermogravimetric analysis showed excellent volatility at elevated temperatures, with complex displaying the lowest residual mass of 0.16% at 500 °C. For complexes , , and , the temperature at a vapor pressure of 1 Torr and the enthalpy of vaporization were estimated to be 58, 64, and 45 °C and 83.31, 103.58, and 99.93 kJ/mol, respectively.