Shahwar Dura, Kapulainen Markku, Haatainen Tomi, Harjanne Mikko, Cherchi Matteo, Sun Zhipei, Aalto Timo, Tappura Kirsi
VTT Technical Research Centre of Finland Ltd, Tietotie 3, 02150 Espoo, Finland.
QTF Centre of Excellence, Department of Electronics and Nanoengineering, Aalto University, 02150 Espoo, Finland.
ACS Omega. 2024 Jul 20;9(30):33055-33063. doi: 10.1021/acsomega.4c04158. eCollection 2024 Jul 30.
Metasurfaces, with their ability to finely manipulate light properties (e.g., polarization), represent a frontier in optical technology. Here, we report innovative gold-based metasurfaces that are adept at changing the light polarization across a broad range of incident angles. Their expansive acceptance angle facilitates seamless integration with silicon waveguides, culminating in the realization of a novel, compact, broadband, and low-loss on-chip polarization rotator. The demonstrated metasurface devices show polarization conversion efficiencies as high as 98.5% at 1550 nm in the free space measurements. Unlike conventional plasmonic metasurfaces, which lack broadband capabilities, our metasurface-based waveplates show extinction ratios of >15 dB for a 120 nm bandwidth. These metasurfaces are positioned on top of up-reflecting mirrors fabricated in a micrometer-scale silicon-on-insulator platform to demonstrate on-chip polarization rotation. The demonstrated polarization rotator shows an extinction ratio of more than 10 dB for a 100 nm bandwidth. This study marks the first successful demonstration of on-chip polarization manipulation utilizing metasurface integration, heralding significant potential impacts for enhancing the functionality and miniaturization of photonic integrated circuits.
超表面能够精细地操控光的特性(如偏振),代表了光学技术的一个前沿领域。在此,我们报道了基于金的创新型超表面,它能够在很宽的入射角范围内改变光的偏振。其宽广的接受角便于与硅波导无缝集成,最终实现了一种新型、紧凑、宽带且低损耗的片上偏振旋转器。在自由空间测量中,所展示的超表面器件在1550纳米处的偏振转换效率高达98.5%。与缺乏宽带能力的传统等离子体超表面不同,我们基于超表面的波片在120纳米带宽内的消光比大于15分贝。这些超表面位于在微米级绝缘体上硅平台制造的上反射镜之上,以展示片上偏振旋转。所展示的偏振旋转器在100纳米带宽内的消光比超过10分贝。这项研究标志着首次成功展示了利用超表面集成进行片上偏振操控,预示着对增强光子集成电路的功能和小型化具有重大潜在影响。