Zhai Ke, Zhou Feng, Wang Yifan, Ma Shihao, Fang Lide, Du Liqun
National & Local Joint Engineering Research Center of Metrology Instrument and System, College of Quality and Technical Supervision, Hebei University, Baoding 071002, China.
National & Local Joint Engineering Research Center of Metrology Instrument and System, College of Quality and Technical Supervision, Hebei University, Baoding 071002, China.
Ultrason Sonochem. 2024 Oct;109:107019. doi: 10.1016/j.ultsonch.2024.107019. Epub 2024 Aug 6.
The electrodeposition process confronts significant challenges arising from mass transfer limitation and residual stress. To address these issues, an innovative method, combining megasonic agitation with coaxial jet electrodeposition, is introduced. This approach aims to enhance mass transfer and mitigate residual stress. First, an electrodeposition nozzle device was designed, and the liquid-phase mass transfer during electrodeposition was analyzed through finite element simulation. Simulation results indicate that the mass transfer coefficient increases with rising megasonic power density. Notably, when the megasonic power density reached 20 W/cm, the mass transfer coefficient increased from 0.45 × 10 m/s to 18.63 × 10 m/s, compared to electrodeposition without megasonic agitation. Secondly, electrodeposition experiments were conducted both with and without megasonic assistance. X-ray diffraction (XRD) was employed to measure the residual stress values of the electrodeposited layers. The results reveal that samples processed with megasonic assistance exhibit lower residual stress values compared to those without. Specifically, at a megasonic power density of 10 W/cm, the residual stress was 94.3 MPa, representing a 37.7 % reduction compared to the residual stress of 151.5 MPa observed in samples without megasonic agitation. Overall, the findings demonstrate that coaxial megasonic agitation can effectively enhance the liquid-phase mass transfer capability during electrodeposition and reduce the residual stress of the electroplated layer. This innovative method presents a promising avenue for improving electrodeposition processes and achieving superior material properties.
电沉积过程面临着由传质限制和残余应力引起的重大挑战。为了解决这些问题，引入了一种将兆声波搅拌与同轴喷射电沉积相结合的创新方法。这种方法旨在增强传质并减轻残余应力。首先，设计了一种电沉积喷嘴装置，并通过有限元模拟分析了电沉积过程中的液相传质。模拟结果表明，传质系数随着兆声波功率密度的增加而增大。值得注意的是，当兆声波功率密度达到20 W/cm时，与无兆声波搅拌的电沉积相比，传质系数从0.45×10⁻⁴ m/s增加到18.63×10⁻⁴ m/s。其次，进行了有无兆声波辅助的电沉积实验。采用X射线衍射（XRD）测量电沉积层的残余应力值。结果表明，与无兆声波辅助的样品相比，有兆声波辅助处理的样品残余应力值更低。具体而言，在兆声波功率密度为10 W/cm时，残余应力为94.3 MPa，与无兆声波搅拌样品中观察到的151.5 MPa的残余应力相比，降低了37.7%。总体而言，研究结果表明同轴兆声波搅拌可以有效提高电沉积过程中的液相传质能力，并降低电镀层的残余应力。这种创新方法为改进电沉积工艺和获得优异的材料性能提供了一条有前景的途径。
