• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利：CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法，用中文像聊天一样搜索，搜遍4000万医学文献。AI智能推荐，让科研检索更轻松。

立即免费搜索

文件翻译

保留排版，准确专业，支持PDF/Word/PPT等文件格式，支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述，25分钟生成高质量综述，智能提取关键信息，辅助科研写作。

立即免费体验

基于柔性衬底的射频微机电系统开关的应力抑制设计

Stress Suppression Design for Radiofrequency Microelectromechanical System Switch Based on a Flexible Substrate.

作者信息

Wang Kang, Chai Zhaoer, Pan Yutang, Gao Chuyuan, Xu Yaxin, Ren Jiawei, Wang Jie, Zhao Fei, Qin Ming, Han Lei

机构信息

Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China.

National Engineering Research Center of Communication Software and Asic Design, China Electronics Technology Group Corporation 54th Research Institute, Shijiazhuang 050081, China.

出版信息

Materials (Basel). 2024 Aug 16;17(16):4068. doi: 10.3390/ma17164068.

DOI:10.3390/ma17164068
PMID:39203246
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11356640/
Abstract

A novel stress suppression design for flexible RF MEMS switches has been presented and demonstrated through theoretical and experimental research to isolate the stress caused by substrate bending. An RF MEMS switch with an S-shaped microspring structure was fabricated by the two-step etching process as a developmental step toward miniaturization and high reliability. The RF MEMS switches with an S-shaped microspring exhibited superior microwave performance and stable driving voltage under different substrate curvatures compared to the conventional non-microspring switches, demonstrating that the bending stress is successfully suppressed by the S-shaped microspring and the island structure. Furthermore, this innovative design could be easily extended to other flexible devices.

摘要

一种用于柔性射频微机电系统（RF MEMS）开关的新型应力抑制设计已通过理论和实验研究提出并得到验证，以隔离由衬底弯曲引起的应力。作为迈向小型化和高可靠性的发展步骤，采用两步蚀刻工艺制造了具有S形微弹簧结构的射频微机电系统开关。与传统的无微弹簧开关相比，具有S形微弹簧的射频微机电系统开关在不同衬底曲率下表现出优异的微波性能和稳定的驱动电压，表明S形微弹簧和岛状结构成功抑制了弯曲应力。此外，这种创新设计可以很容易地扩展到其他柔性器件。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/6b3ca1a893f5/materials-17-04068-g018.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/4aa8695bfcb5/materials-17-04068-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/a760bca043a9/materials-17-04068-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/ca1567aea3d3/materials-17-04068-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/7273dc2638e0/materials-17-04068-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/8703d4bce505/materials-17-04068-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/86afac46b409/materials-17-04068-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/801550df922b/materials-17-04068-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/1887e72209c6/materials-17-04068-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/f32ae1336a74/materials-17-04068-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/dcc84056e685/materials-17-04068-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/010ec61cb434/materials-17-04068-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/74d89974052b/materials-17-04068-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/34900a292c85/materials-17-04068-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/a64cfb5118b2/materials-17-04068-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/7a077d559121/materials-17-04068-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/82826dbcfb18/materials-17-04068-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/bc7418ef7f78/materials-17-04068-g017.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/6b3ca1a893f5/materials-17-04068-g018.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/4aa8695bfcb5/materials-17-04068-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/a760bca043a9/materials-17-04068-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/ca1567aea3d3/materials-17-04068-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/7273dc2638e0/materials-17-04068-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/8703d4bce505/materials-17-04068-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/86afac46b409/materials-17-04068-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/801550df922b/materials-17-04068-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/1887e72209c6/materials-17-04068-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/f32ae1336a74/materials-17-04068-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/dcc84056e685/materials-17-04068-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/010ec61cb434/materials-17-04068-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/74d89974052b/materials-17-04068-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/34900a292c85/materials-17-04068-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/a64cfb5118b2/materials-17-04068-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/7a077d559121/materials-17-04068-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/82826dbcfb18/materials-17-04068-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/bc7418ef7f78/materials-17-04068-g017.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5ea2/11356640/6b3ca1a893f5/materials-17-04068-g018.jpg

相似文献

1
Stress Suppression Design for Radiofrequency Microelectromechanical System Switch Based on a Flexible Substrate.基于柔性衬底的射频微机电系统开关的应力抑制设计
Materials (Basel). 2024 Aug 16;17(16):4068. doi: 10.3390/ma17164068.
2
Recent Advances in Flexible RF MEMS.柔性射频微机电系统的最新进展
Micromachines (Basel). 2022 Jul 8;13(7):1088. doi: 10.3390/mi13071088.
3
Comprehensive Review of RF MEMS Switches in Satellite Communications.卫星通信中射频微机电系统开关的综合综述
Sensors (Basel). 2024 May 15;24(10):3135. doi: 10.3390/s24103135.
4
Implementation of Highly Reliable Contacts for RF MEMS Switches.用于射频微机电系统开关的高可靠性触点的实现。
Micromachines (Basel). 2024 Jan 20;15(1):155. doi: 10.3390/mi15010155.
5
Machine Learning-Based Modeling and Generic Design Optimization Methodology for Radio-Frequency Microelectromechanical Devices.基于机器学习的射频微机电系统建模与通用设计优化方法。
Sensors (Basel). 2023 Apr 14;23(8):4001. doi: 10.3390/s23084001.
6
Nonlinear restructuring of patterned thin films by residual stress engineering into out-of-plane wavy-shaped electrostatic microactuators for high-performance radio-frequency switches.通过残余应力工程将图案化薄膜进行非线性重构，制成用于高性能射频开关的面外波浪形静电微致动器。
Microsyst Nanoeng. 2023 Jun 7;9:74. doi: 10.1038/s41378-023-00549-5. eCollection 2023.
7
Design and Fabrication of a Ka Band RF MEMS Switch with High Capacitance Ratio and Low Actuation Voltage.具有高电容比和低驱动电压的Ka波段射频微机电系统开关的设计与制造
Micromachines (Basel). 2021 Dec 28;13(1):37. doi: 10.3390/mi13010037.
8
Application of Ni/SiCw Composite Material in MEMS Microspring.镍/碳化硅晶须复合材料在微机电系统微弹簧中的应用。
Micromachines (Basel). 2023 Sep 14;14(9):1767. doi: 10.3390/mi14091767.
9
Design and Analysis of the Capacitive RF MEMS Switches with Support Pillars.带有支撑柱的电容式射频微机电系统开关的设计与分析
Sensors (Basel). 2022 Nov 16;22(22):8864. doi: 10.3390/s22228864.
10
Multi-Physical Models of Bending Characteristics on the Double-Clamped Beam Switch for Flexible Electronic Devices Application.用于柔性电子器件应用的双夹梁开关弯曲特性的多物理模型
Sensors (Basel). 2020 Dec 10;20(24):7074. doi: 10.3390/s20247074.

本文引用的文献

1
Laser-Assisted Structuring of Graphene Films with Biocompatible Liquid Crystal Polymer for Skin/Brain-Interfaced Electrodes.用于皮肤/大脑接口电极的具有生物相容性液晶聚合物的石墨烯薄膜的激光辅助结构化
Adv Healthc Mater. 2024 Jan;13(3):e2301753. doi: 10.1002/adhm.202301753. Epub 2023 Nov 12.
2
Flexible Liquid Crystal Polymer Technologies from Microwave to Terahertz Frequencies.从微波到太赫兹频率的灵活液晶聚合物技术。
Molecules. 2022 Feb 16;27(4):1336. doi: 10.3390/molecules27041336.
3
24 GHz Flexible Antenna for Doppler Radar-Based Human Vital Signs Monitoring.
24GHz 灵活天线，用于基于多普勒雷达的人体生命体征监测。
Sensors (Basel). 2021 May 27;21(11):3737. doi: 10.3390/s21113737.
4
Bending Analysis of Polymer-Based Flexible Antennas for Wearable, General IoT Applications: A Review.用于可穿戴通用物联网应用的聚合物基柔性天线的弯曲分析：综述
Polymers (Basel). 2021 Jan 22;13(3):357. doi: 10.3390/polym13030357.
5
Multi-Physical Models of Bending Characteristics on the Double-Clamped Beam Switch for Flexible Electronic Devices Application.用于柔性电子器件应用的双夹梁开关弯曲特性的多物理模型
Sensors (Basel). 2020 Dec 10;20(24):7074. doi: 10.3390/s20247074.
6
A flexible depth probe using liquid crystal polymer.一种采用液晶聚合物的柔性深度探头。
IEEE Trans Biomed Eng. 2012 Jul;59(7):2085-94. doi: 10.1109/TBME.2012.2196274.