Guo Cheng, Zhuang Weizhen, He Jingwen
Guangdong Provincial Key Laboratory of Micro/Nano Optomechatronics Engineering, College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen 518060, China.
Shenzhen Key Laboratory of High Performance Nontraditional Manufacturing, College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen 518060, China.
Micromachines (Basel). 2024 Aug 1;15(8):1002. doi: 10.3390/mi15081002.
In order to introduce the magnetic field into micro electrical machining technology to explore the influence of magnetic field on micro electrical machining, the development of a precision controllable magnetic field-assisted platform is particularly important. This platform needs to precisely control the spatial magnetic field. This study first completes the hardware design and construction of the magnetic field generation device, using electromagnetic coils with soft iron cores as the sources of the magnetic field. Mathematical models of the magnetic field are established and calibrated. Since the magnetic dipole model cannot effectively describe the magnetic field generated by the electromagnetic coil, this study adopts a more precise description method: the spherical harmonic function expansion model and the magnetic multipole superposition model. The calibration of the magnetic field model is based on actual excitation magnetic field data, so a magnetic field sampling device is designed to obtain the excitation magnetic field of the workspace. The model is calibrated based on a combination of the theoretical model and magnetic field data, and the performance of the constructed setup is analyzed. Finally, a magnetic field-assisted platform has been developed which can generate magnetic fields in any direction within the workspace with intensities ranging from 0 to 0.2 T. Its magnetic field model arrives at an error percentage of 2.986%, a variance of 0.9977, and a root mean square error (RMSE) of 0.71 mT, achieving precise control of the magnetic field in the workspace.
为了将磁场引入微电加工技术，探索磁场对微电加工的影响，开发一种精度可控的磁场辅助平台尤为重要。该平台需要精确控制空间磁场。本研究首先完成了磁场发生装置的硬件设计与搭建，采用带软铁芯的电磁线圈作为磁场源。建立并校准了磁场的数学模型。由于磁偶极子模型无法有效描述电磁线圈产生的磁场，本研究采用了一种更精确的描述方法：球谐函数展开模型和磁多极叠加模型。磁场模型的校准基于实际励磁磁场数据，因此设计了一个磁场采样装置来获取工作空间的励磁磁场。基于理论模型和磁场数据的组合对模型进行校准，并分析所构建装置的性能。最后，开发了一个磁场辅助平台，该平台能够在工作空间内产生强度范围为0至0.2 T的任意方向的磁场。其磁场模型的误差百分比为2.986%，方差为0.9977，均方根误差（RMSE）为0.71 mT，实现了对工作空间内磁场的精确控制。
