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基于隧道磁阻传感器的MEMS超声电机高分辨率旋转测量系统

High-Resolution Rotation-Measuring System for MEMS Ultrasonic Motors Using Tunneling Magnetoresistance Sensors.

作者信息

He Jiangbo, Feng Qiuyue, Chen Yu, Yang Tianyu, Li Xiaoshi, Zhou Wu

机构信息

School of Mechanical Engineering, Xihua University, Chengdu 610039, China.

Microsystem and Terahertz Research Center, China Academy of Engineering Physics, Chengdu 610299, China.

出版信息

Micromachines (Basel). 2024 Aug 12;15(8):1028. doi: 10.3390/mi15081028.

DOI:10.3390/mi15081028
PMID:39203679
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11356207/
Abstract

This study proposes a high-resolution rotation-measuring system for miniaturized MEMS ultrasonic motors using tunneling magnetoresistance (TMR) sensors for the first time. Initially, the architecture and principle of the rotation-measuring system are described in detail. Then, the finite element simulation is implemented to determine the miniaturized permanent magnet's residual magnetization, dimensions, and TMR sensor position. Finally, the experiments are implemented to evaluate the performance. Using calibration based on a high-precision servo motor, it is found that the relationship between the output and rotational angle is highly linear and immune to the rotor's out-of-plane movement. Meanwhile, the angle-detecting resolution is higher than 0.1°. After the calibration, the continuous rotation of the MEMS ultrasonic motor is tested. It is found that the angle testing result varies with a period close to 360°, which indicates that the rotation-measuring system has successfully detected the motor's rotation.

摘要

本研究首次提出了一种用于小型化微机电系统（MEMS）超声电机的高分辨率旋转测量系统，该系统采用隧道磁阻（TMR）传感器。首先，详细描述了旋转测量系统的架构和原理。然后，进行有限元模拟以确定小型化永磁体的剩余磁化强度、尺寸和TMR传感器位置。最后，进行实验以评估性能。通过基于高精度伺服电机的校准发现，输出与旋转角度之间的关系具有高度线性，并且不受转子平面外运动的影响。同时，角度检测分辨率高于0.1°。校准后，对MEMS超声电机的连续旋转进行了测试。发现角度测试结果以接近360°的周期变化，这表明旋转测量系统已成功检测到电机的旋转。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/a4c8dfe22519/micromachines-15-01028-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/85af340b3a67/micromachines-15-01028-g001a.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/c3bfee17b950/micromachines-15-01028-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/9199f44f8d2f/micromachines-15-01028-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/8d6d51b09524/micromachines-15-01028-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/2979e5d10e81/micromachines-15-01028-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/d495ad4c2421/micromachines-15-01028-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/eb243d59c2c4/micromachines-15-01028-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/81e80f0dbf6d/micromachines-15-01028-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/045470cc9d52/micromachines-15-01028-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/a4c8dfe22519/micromachines-15-01028-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/85af340b3a67/micromachines-15-01028-g001a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/f9ef5335c5bb/micromachines-15-01028-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/ce3daeb88436/micromachines-15-01028-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/e7035ac59bbb/micromachines-15-01028-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/a8fab8e658c6/micromachines-15-01028-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/c3bfee17b950/micromachines-15-01028-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/9199f44f8d2f/micromachines-15-01028-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/8d6d51b09524/micromachines-15-01028-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/2979e5d10e81/micromachines-15-01028-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/d495ad4c2421/micromachines-15-01028-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/eb243d59c2c4/micromachines-15-01028-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/81e80f0dbf6d/micromachines-15-01028-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/045470cc9d52/micromachines-15-01028-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94ba/11356207/a4c8dfe22519/micromachines-15-01028-g014.jpg

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