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基于BP和NSGA-II算法优化的具有低交叉轴灵敏度的谐振式MEMS加速度计。

Resonant MEMS Accelerometer with Low Cross-Axis Sensitivity-Optimized Based on BP and NSGA-II Algorithms.

作者信息

Miao Jiaqi, Li Pinghua, Lv Mingchen, Nie Suzhen, Liu Yang, Liang Ruimei, Ma Weijiang, Zhuang Xuye

机构信息

College of Mechanical Engineering, Shandong University of Technology, Zibo 255000, China.

出版信息

Micromachines (Basel). 2024 Aug 18;15(8):1049. doi: 10.3390/mi15081049.

DOI:10.3390/mi15081049
PMID:39203700
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11356109/
Abstract

This article proposes a low cross-axis sensitivity resonant MEMS(Micro-Electro-Mechanical Systems) accelerometer that is optimized based on the BP and NSGA-II algorithms. When resonant accelerometers are used in seismic monitoring, automotive safety systems, and navigation applications, high immunity and low cross-axis sensitivity are required. To improve the high immunity of the accelerometer, a coupling structure is introduced. This structure effectively separates the symmetric and antisymmetric mode frequencies of the DETF resonator and prevents mode coupling. To obtain higher detection accuracy and low cross-axis sensitivity, a decoupling structure is introduced. To find the optimal dimensional parameters of the decoupled structure, the BP and NSGA-II algorithms are used to optimize the dimensional parameters of the decoupled structure. The optimized decoupled structure has an axial stiffness of 6032.21 N/m and a transverse stiffness of 6.29 N/m. The finite element analysis results show that the sensitivity of the accelerometer is 59.1 Hz/g (-axis) and 59 Hz/g (-axis). Cross-axis sensitivity is 0.508% (-axis) and 0.339% (-axis), which is significantly lower than most resonant accelerometers. The coupling structure and optimization method proposed in this paper provide a new solution for designing resonant accelerometers with high interference immunity and low cross-axis sensitivity.

摘要

本文提出了一种基于BP和NSGA-II算法优化的低交叉轴灵敏度谐振微机电系统（MEMS）加速度计。当谐振式加速度计用于地震监测、汽车安全系统和导航应用时，需要高抗干扰性和低交叉轴灵敏度。为提高加速度计的高抗干扰性，引入了一种耦合结构。该结构有效地分离了DETF谐振器的对称和反对称模式频率，并防止了模式耦合。为了获得更高的检测精度和低交叉轴灵敏度，引入了解耦结构。为了找到解耦结构的最佳尺寸参数，使用BP和NSGA-II算法对解耦结构的尺寸参数进行优化。优化后的解耦结构轴向刚度为6032.21 N/m，横向刚度为6.29 N/m。有限元分析结果表明，加速度计的灵敏度为59.1 Hz/g（-轴）和59 Hz/g（-轴）。交叉轴灵敏度为0.508%（-轴）和0.339%（-轴），明显低于大多数谐振式加速度计。本文提出的耦合结构和优化方法为设计具有高抗干扰性和低交叉轴灵敏度的谐振式加速度计提供了一种新的解决方案。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70f0/11356109/fc3691e66b6a/micromachines-15-01049-g019a.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70f0/11356109/398ea33350b2/micromachines-15-01049-g013.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70f0/11356109/d46e19d5f107/micromachines-15-01049-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70f0/11356109/2a4ef2d0ff20/micromachines-15-01049-g017.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70f0/11356109/d840b4f6e9f4/micromachines-15-01049-g018.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70f0/11356109/fc3691e66b6a/micromachines-15-01049-g019a.jpg

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Investigation of the Influence of Temperature and Humidity on the Bandwidth of an Accelerometer.
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Sci Rep. 2020 Jun 26;10(1):10415. doi: 10.1038/s41598-020-67046-x.
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Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers.微机械谐振式加速度计的温度不敏感结构设计。
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