Mustafazade Arif, Pandit Milind, Zhao Chun, Sobreviela Guillermo, Du Zhijun, Steinmann Philipp, Zou Xudong, Howe Roger T, Seshia Ashwin A
Nanoscience Centre, Department of Engineering, University of Cambridge, Cambridge, CB3 0FF, UK.
Silicon Microgravity Ltd., Cambridge Innovation Park, Waterbeach, Cambridge, CB25 9GL, UK.
Sci Rep. 2020 Jun 26;10(1):10415. doi: 10.1038/s41598-020-67046-x.
This paper introduces a differential vibrating beam MEMS accelerometer demonstrating excellent long-term stability for applications in gravimetry and seismology. The MEMS gravimeter module demonstrates an output Allan deviation of 9 μGal for a 1000 s integration time, a noise floor of 100 μGal/√Hz, and measurement over the full ±1 g dynamic range (1 g = 9.81 ms). The sensitivity of the device is demonstrated through the tracking of Earth tides and recording of ground motion corresponding to a number of teleseismic events over several months. These results demonstrate that vibrating beam MEMS accelerometers can be employed for measurements requiring high levels of stability and resolution with wider implications for precision measurement employing other resonant-output MEMS devices such as gyroscopes and magnetometers.
本文介绍了一种差分振动梁微机电系统（MEMS）加速度计，该加速度计在重力测量和地震学应用中表现出出色的长期稳定性。MEMS重力仪模块在1000秒积分时间内的输出阿伦偏差为9微伽，本底噪声为100微伽/√赫兹，可在整个±1g动态范围内进行测量（1g = 9.81米/秒²）。通过对地球潮汐的跟踪以及在几个月内记录与多次远震事件对应的地面运动，展示了该设备的灵敏度。这些结果表明，振动梁MEMS加速度计可用于需要高稳定性和分辨率的测量，这对采用其他谐振输出MEMS器件（如陀螺仪和磁力计）的精密测量具有更广泛的意义。
