Lv Mingchen, Li Pinghua, Miao Jiaqi, Qiao Qi, Liang Ruimei, Li Gaolin, Zhuang Xuye
College of Mechanical Engineering, Shandong University of Technology, Zibo 255000, China.
Micromachines (Basel). 2024 Apr 10;15(4):509. doi: 10.3390/mi15040509.
With the continuous progress of aerospace, military technology, and marine development, the MEMS resonance pressure sensor puts forward the requirements of not only a wide range but also high sensitivity. However, traditional resonators are hardly compatible with both. In response, we propose a new sensor structure. By arranging the resonant beam and the sensitive diaphragm vertically in space, the new structure improves the rigidity of the diaphragm without changing the thickness of the diaphragm and achieves the purpose of increasing the range without affecting the sensitivity. To find the optimal structural parameters for the sensor sensitivity and range, and to prevent the effects of modal disturbances, we propose a multi-objective optimization design scheme based on the BP and NSGA-II algorithms. The optimization of the structure parameters not only improved the sensitivity but also increased the interference frequency to solve the issue of mode interference. The optimized structure achieves a sensitivity and range of 4.23 Hz/kPa and 1-10 MPa, respectively. Its linear influence factor is 38.07, significantly higher than that of most resonant pressure sensors. The structural and algorithmic optimizations proposed in this paper provide a new method for designing resonant pressure sensors compatible with a wide range and high sensitivity.
随着航空航天、军事技术和海洋开发的不断进步，MEMS 谐振压力传感器不仅提出了宽量程的要求，而且对高灵敏度也有需求。然而，传统谐振器很难同时满足这两个要求。对此，我们提出了一种新型传感器结构。通过在空间上垂直排列谐振梁和敏感膜片，这种新结构在不改变膜片厚度的情况下提高了膜片的刚度，实现了在不影响灵敏度的前提下增加量程的目的。为了找到传感器灵敏度和量程的最佳结构参数，并防止模态干扰的影响，我们提出了一种基于 BP 和 NSGA-II 算法的多目标优化设计方案。结构参数的优化不仅提高了灵敏度，还增加了干扰频率，解决了模态干扰问题。优化后的结构灵敏度和量程分别达到 4.23 Hz/kPa 和 1 - 10 MPa。其线性影响因子为 38.07，明显高于大多数谐振压力传感器。本文提出的结构和算法优化为设计宽量程、高灵敏度兼容的谐振压力传感器提供了一种新方法。
