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具有大光腔的高功率940 nm分布反馈激光二极管。

High-power 940 nm DFB laser diode with large optical cavity.

作者信息

Zhao Fang, Wang Cuiluan, Liu Zhenwu, Xing Wang, Liu Suping, Zhu Lingni, Ma Xiaoyu

出版信息

Opt Lett. 2024 Sep 1;49(17):4799-4802. doi: 10.1364/OL.534672.

DOI:10.1364/OL.534672
PMID:39207967
Abstract

High-power laser diodes with a stable wavelength and narrow linewidth are crucial for many applications. In this study, we introduce a first-order distributed feedback (DFB) grating into an asymmetric large-cavity laser diode operating around 940 nm. This design maintains high output power and offers a wide temperature locking range. The nearly sinusoidal shape first-order grating is fabricated by ultraviolet (UV) nanoimprint lithography, inductively coupled plasma (ICP) dry etching, and wet polishing. At a heat sink temperature of 25°C, the DFB laser diode, with a 200 µm stripe width and 4 mm cavity length, achieves a maximum output power of 24.8 W and a full width at half maximum (FWHM) of 0.4 nm under continuous-wave (CW) conditions. The maximum slope efficiency is calculated to be 1.04 W/A. At an output power of 10.7 W, the device reaches a peak wall-plug efficiency of 56%. Under quasi-continuous operation at 20 A, the laser output spectrum remains locked to the DFB grating over a temperature range from -10°C to 110°C, with a temperature coefficient of 0.062 nm/°C.

摘要

具有稳定波长和窄线宽的高功率激光二极管对许多应用至关重要。在本研究中,我们将一阶分布反馈(DFB)光栅引入到工作在940 nm左右的非对称大腔激光二极管中。这种设计保持了高输出功率,并提供了宽温度锁定范围。接近正弦形状的一阶光栅通过紫外(UV)纳米压印光刻、电感耦合等离子体(ICP)干法蚀刻和湿法抛光制成。在25°C的散热器温度下,具有200 µm条纹宽度和4 mm腔长的DFB激光二极管在连续波(CW)条件下实现了24.8 W的最大输出功率和0.4 nm的半高全宽(FWHM)。计算得出的最大斜率效率为1.04 W/A。在10.7 W的输出功率下,该器件达到了56%的峰值壁插效率。在20 A的准连续运行下,激光输出光谱在-10°C至110°C的温度范围内保持锁定在DFB光栅上,温度系数为0.062 nm/°C。

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