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用于制备具有可调性能的透明多组分玻璃的二氧化硅基纳米复合材料的高分辨率结构化

High-Resolution Structuring of Silica-Based Nanocomposites for the Fabrication of Transparent Multicomponent Glasses with Adjustable Properties.

作者信息

Prediger Richard, Kluck Sebastian, Hambitzer Leonhard, Sauter Daniel, Kotz-Helmer Frederik

机构信息

Laboratory of Process Engineering, NeptunLab, Department of Microsystems Engineering (IMTEK), University of Freiburg, 79110, Freiburg, Germany.

Laboratory for Micro-Optics, Department of Microsystems Engineering (IMTEK), University of Freiburg, 79110, Freiburg, Germany.

出版信息

Adv Mater. 2024 Nov;36(44):e2407630. doi: 10.1002/adma.202407630. Epub 2024 Sep 1.

Abstract

Silicate-based multicomponent glasses are of high interest for technical applications due to their tailored properties, such as an adaptable refractive index or coefficient of thermal expansion. However, the production of complex structured parts is associated with high effort, since glass components are usually shaped from high-temperature melts with subsequent mechanical or chemical postprocessing. Here for the first time the fabrication of binary and ternary multicomponent glasses using doped nanocomposites based on silica nanoparticles and photocurable metal oxide precursors as part of the binder matrix is presented. The doped nanocomposites are structured in high resolution using UV-casting and additive manufacturing techniques, such as stereolithography and two-photon lithography. Subsequently, the composites are thermally converted into transparent glass. By incorporating titanium oxide, germanium oxide, or zirconium dioxide into the silicate glass network, multicomponent glasses are fabricated with an adjustable refractive index n between 1.4584-1.4832 and an Abbe number V of 53.85-61.13. It is further demonstrated that by incorporating 7 wt% titanium oxide, glasses with ultralow thermal expansion can be fabricated with so far unseen complexity. These novel materials enable for the first time high-precision lithographic structuring of multicomponent silica glasses with applications from optics and photonics, semiconductors as well as sensors.

摘要

基于硅酸盐的多组分玻璃因其定制特性,如可适应的折射率或热膨胀系数,在技术应用中备受关注。然而,复杂结构部件的生产需要付出巨大努力,因为玻璃部件通常由高温熔体成型,随后进行机械或化学后处理。本文首次展示了使用基于二氧化硅纳米颗粒和光固化金属氧化物前驱体的掺杂纳米复合材料作为粘合剂基质的一部分来制造二元和三元多组分玻璃。通过紫外浇铸和立体光刻、双光子光刻等增材制造技术对掺杂纳米复合材料进行高分辨率结构化。随后,将复合材料热转化为透明玻璃。通过将氧化钛、氧化锗或二氧化锆掺入硅酸盐玻璃网络中,制造出了折射率n在1.4584 - 1.4832之间、阿贝数V在53.85 - 61.13之间的可调节多组分玻璃。进一步证明,通过掺入7 wt%的氧化钛,可以制造出具有前所未有的复杂性的超低热膨胀玻璃。这些新型材料首次实现了多组分二氧化硅玻璃的高精度光刻结构化,其应用涵盖光学和光子学、半导体以及传感器领域。

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