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基于纤维段结构和等离子体处理的耐恶劣环境、高性能软压力传感器

Harsh Environment-Tolerant, High Performance Soft Pressure Sensors Enabled by Fiber-Segment Structure and Plasma Treatment.

作者信息

Gao Junxue, Zhao Binzhe, Chen Xi, Gu Mengxi, Zhang Wenli, Wang Lei, Wei Lei, Yang Chunlei, Chen Ming

机构信息

Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518055, P. R. China.

School of Nano Science and Technology, University of Science and Technology of China, Suzhou, 215000, P. R. China.

出版信息

Small. 2024 Dec;20(49):e2403495. doi: 10.1002/smll.202403495. Epub 2024 Sep 9.

DOI:10.1002/smll.202403495
PMID:39246203
Abstract

As the demand for specialized and diversified pressure sensors continues to increase, excellent performance and multi-applicability have become necessary for pressure sensors. Currently, flexible pressure sensors are primarily utilized in fields such as health monitoring and human-computer interaction. However, numerous complex extreme environments in reality, including deep sea, corrosive conditions, extreme cold, and high temperatures, urgently require the services of flexible devices. Here, a piezoresistive flexible pressure sensor based on expanded polytetrafluoroethylene/functionalized carbon nanotubes (EPTFE/FCNT) is proposed. Benefiting from the unique fiber-segment architecture, chemical stability, and strong chemical binding force between EPTFE and FCNT, the fabricated sensor exhibits remarkable sensing capabilities and can be employed in multifarious extreme environments. It demonstrates a sensitivity of 862.28 kPa, a response time of 6-7 ms, and a detection limit below 1 Pa. Furthermore, it possesses a pressure resolution of 0.0018% under 111 kPa and can withstand over 10,000 loading and unloading cycles under 1 MPa. Additionally, the EPTFE/FCNT sensor retains its outstanding pressure response and work efficiency in extreme conditions such as an ultra-low temperature of -80 °C, high temperature (200 °C), acidic and alkaline corrosion, and underwater. These notable attributes enormously broaden the sensors' real-world application range.

摘要

随着对专业化和多样化压力传感器的需求持续增长,优异的性能和多适用性已成为压力传感器的必备条件。目前,柔性压力传感器主要应用于健康监测和人机交互等领域。然而,现实中众多复杂的极端环境,包括深海、腐蚀性环境、极寒和高温,迫切需要柔性设备的服务。在此,提出了一种基于膨胀聚四氟乙烯/功能化碳纳米管(EPTFE/FCNT)的压阻式柔性压力传感器。得益于独特的纤维段结构、化学稳定性以及EPTFE与FCNT之间强大的化学结合力,所制备的传感器展现出卓越的传感能力,可应用于多种极端环境。它的灵敏度为862.28 kPa,响应时间为6 - 7毫秒,检测限低于1 Pa。此外,在111 kPa下它的压力分辨率为0.0018%,在1 MPa下可承受超过10000次的加载和卸载循环。此外,EPTFE/FCNT传感器在诸如-80°C的超低温、高温(200°C)、酸碱腐蚀和水下等极端条件下仍保持其出色的压力响应和工作效率。这些显著特性极大地拓宽了传感器的实际应用范围。

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