Ma Chao, Xiong Chunyue, Zhao Rui, Wang Kang, Yang Mengmeng, Liang Yi, Li Mingliang, Han Daoyang, Wang Hailong, Zhang Rui, Shao Gang
School of Materials Science and Engineering, Zhengzhou University, Zhengzhou, 450001 Henan, China; Zhongyuan Critical Metal Laboratory, Zhengzhou University, Zhengzhou, Henan 450001, China.
School of Materials Science and Engineering, Zhengzhou University, Zhengzhou, 450001 Henan, China.
J Colloid Interface Sci. 2025 Jan 15;678(Pt A):503-510. doi: 10.1016/j.jcis.2024.08.153. Epub 2024 Aug 22.
Traditional silicon-based pressure sensors cannot meet demand of pressure information acquisition in high-temperature extreme environments due to their low sensitivity, limited detection temperature and complex processing. Herein, a capacitive pressure sensor is fabricated using polymer-derived SiCN ceramics with convex microstructures via a sample replication strategy. Its performance is measured at different pressures (0-800 kPa) from room temperature to 500 °C. The results show that the SiCN ceramic capacitive pressure sensor exhibits low hysteresis, good non-linearity of 0.26 %, outstanding repeatability and high sensitivity of 0.197 pF/MPa under room temperature. When the test temperature reaches 500 °C, the performance of the prepared capacitive pressure sensor has no degradation, keeping competent sensitivity of 0.214 pF/MPa and nonlinear error of 0.24 %. Therefore, benefitting from the preeminent high-temperature properties, e.g., excellent oxidation/corrosion resistance and thermal stability, SiCN ceramics capacitive pressure sensors have great potential in the application of high-temperature and harsh environments.
传统的硅基压力传感器由于灵敏度低、检测温度有限以及处理复杂，无法满足高温极端环境下压力信息采集的需求。在此，通过样品复制策略，使用具有凸微结构的聚合物衍生SiCN陶瓷制备了一种电容式压力传感器。在从室温到500°C的不同压力（0-800 kPa）下对其性能进行了测量。结果表明，SiCN陶瓷电容式压力传感器在室温下具有低滞后、0.26%的良好非线性、出色的重复性和0.197 pF/MPa的高灵敏度。当测试温度达到500°C时，所制备的电容式压力传感器的性能没有下降，保持了0.214 pF/MPa的有效灵敏度和0.24%的非线性误差。因此，受益于卓越的高温性能，如优异的抗氧化/腐蚀性能和热稳定性，SiCN陶瓷电容式压力传感器在高温和恶劣环境的应用中具有巨大潜力。
