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高分辨率扫描离子显微镜及二次离子质谱成像微分析的进展

Progress in high resolution scanning ion microscopy and secondary ion mass spectrometry imaging microanalysis.

作者信息

Levi-Setti R, Crow G, Wang Y L

出版信息

Scan Electron Microsc. 1985(Pt 2):535-52.

PMID:3931206
Abstract

The performance of a new high resolution scanning ion microprobe (SIM) is elucidated with regard to imaging capabilities using the ion-induced secondary electron (ISE) or secondary ion (ISI) signals, and the mass-resolved signal from a secondary ion mass spectrometry (SIMS) system. The new instrument focuses a beam extracted from a liquid metal ion source (LMIS) to a range of spot sizes reaching the 20 nm level. The probe current (1.6 pA) available at this level of lateral resolution, which approaches the theoretical resolution limits of the SIMS method, is still adequate to obtain detailed isotopic maps for surfaces rich in the elements of low ionization potential (positive ISI), or high electron affinity (negative ISI). In addition to examples of high resolution ISE and ISI images of objects displaying sufficiently small topographic detail, mass spectra and isotopic maps are shown, testing both the lateral and depth resolution attained. The latter results belong with a program of interdisciplinary research applications of the new microprobe, which include studies of e.g., the monolayer lateral distribution of intercalant in SbCl5 intercalated graphite and of silicate minerals and iron distribution in sections of chondrules and their rims (components of chondrites, a class of stony meteorites). In the biomedical field, the new microprobe finds application in e.g., the study of human renal calculi and bone. Most promising is the use of stable isotope tracers (e.g., Ca44) to unravel the dynamics of bone mineralization, as thus far shown with the in-vitro culture of the skull bone of neonatal mice.

摘要

通过离子诱导二次电子(ISE)或二次离子(ISI)信号以及二次离子质谱(SIMS)系统的质量分辨信号,对一种新型高分辨率扫描离子微探针(SIM)的成像能力进行了阐释。这台新仪器将从液态金属离子源(LMIS)引出的束流聚焦到一系列光斑尺寸,可达20纳米水平。在这种横向分辨率水平下可获得的探针电流(1.6皮安)接近SIMS方法的理论分辨率极限,对于富含低电离势元素(正ISI)或高电子亲和势元素(负ISI)的表面,仍足以获取详细的同位素图谱。除了展示具有足够小地形细节的物体的高分辨率ISE和ISI图像示例外,还给出了质谱图和同位素图谱,以测试所达到的横向和深度分辨率。后者的结果属于新微探针跨学科研究应用项目的一部分,该项目包括例如对SbCl5插层石墨中插层剂的单层横向分布、球粒及其边缘(球粒陨石的组成部分,一类石陨石)切片中的硅酸盐矿物和铁分布的研究。在生物医学领域,这种新微探针可应用于例如对人类肾结石和骨骼的研究。最有前景的是使用稳定同位素示踪剂(如Ca44)来揭示骨矿化的动态过程,这在新生小鼠颅骨的体外培养中已得到证实。

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