Liu Hao, Xie Wanda, Ding Ye, Chen Ke, Wang Shuiwang, Huo Haodong, Yang Lijun
School of Mechatronics Engineering, Harbin Institute of Technology, Harbin, Heilongjiang 150001, China.
Nanoscale. 2024 Nov 28;16(46):21189-21215. doi: 10.1039/d4nr03305a.
Laser technology is integral to the advancement of micro/nano-fabrication. While laser machining offers numerous advantages over alternative micro/nano-fabrication techniques, several challenges and bottlenecks continue to impede its large-scale industrial implementation. In response to these constraints, the molecular dynamics (MD) method has emerged as a formidable tool for optimizing the process parameters of laser micro/nano-fabrication and investigating alternative laser-based micro/nano-fabrication techniques. In this review, the application of MD in laser-based micro/nano-fabrication is comprehensively examined, including numerical simulations of short-pulse, long-pulse, continued laser and hybrid laser machining. The corresponding MD simulation schemes for lasers with different pulse widths are outlined. The mechanisms of laser-material interactions across diverse processing scenarios and the complete process of laser-based micro/nano-fabrication are also elucidated. Furthermore, the prevailing challenges in this domain and potential solutions are discussed, with future research directions being charted based on current knowledge and technological advancements.
激光技术是微纳加工进步不可或缺的一部分。虽然激光加工相对于其他微纳加工技术具有诸多优势，但仍有一些挑战和瓶颈阻碍其大规模工业应用。针对这些限制，分子动力学（MD）方法已成为优化激光微纳加工工艺参数和研究基于激光的替代微纳加工技术的强大工具。在本综述中，全面研究了MD在基于激光的微纳加工中的应用，包括短脉冲、长脉冲、连续激光和混合激光加工的数值模拟。概述了不同脉冲宽度激光的相应MD模拟方案。还阐明了不同加工场景下激光与材料相互作用的机制以及基于激光的微纳加工的完整过程。此外，讨论了该领域当前面临的挑战和潜在解决方案，并根据当前的知识和技术进步规划了未来的研究方向。
