用于主动控制光传输的基于氧化铟锡的电可调超表面

ITO-Based Electrically Tunable Metasurface for Active Control of Light Transmission.

作者信息

Ma Ruize, Mao Yu, Li Peiyang, Li Dong, Wen Dandan

机构信息

Key Laboratory of Light Field Manipulation and Information Acquisition, Ministry of Industry and Information Technology, Xi'an 710129, China.

Shaanxi Key Laboratory of Optical Information Technology, School of Physical Science and Technology, Northwestern Polytechnical University, Xi'an 710129, China.

出版信息

Nanomaterials (Basel). 2024 Oct 5;14(19):1606. doi: 10.3390/nano14191606.

DOI:10.3390/nano14191606

PMID:39404333

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11479147/

Abstract

In recent years, the rapid development of dynamically tunable metasurfaces has provided a new avenue for flexible control of optical properties. This paper introduces a transmission-type electrically tunable metasurface, employing a series of subwavelength-scale silicon (Si) nanoring structures with an intermediate layer of AlO-ITO-AlO. This design allows the metasurface to induce strong Mie resonance when transverse electric (TE) waves are normally incident. When a bias voltage is applied, the interaction between light and matter is enhanced due to the formation of an electron accumulation layer at the ITO-AlO interface, thereby altering the resonance characteristics of the metasurface. This design not only avoids the absorption loss of metal nanostructures and has a large modulation depth, but also shows compatibility with complementary metal oxide semiconductor (CMOS) technology.

摘要

近年来，动态可调超表面的快速发展为灵活控制光学特性提供了一条新途径。本文介绍了一种透射型电可调超表面，它采用了一系列具有AlO-ITO-AlO中间层的亚波长尺度硅（Si）纳米环结构。这种设计使得超表面在横向电场（TE）波垂直入射时能够引发强烈的米氏共振。施加偏置电压时，由于在ITO-AlO界面形成电子积累层，光与物质之间的相互作用增强，从而改变超表面的共振特性。这种设计不仅避免了金属纳米结构的吸收损耗且具有较大的调制深度，还展现出与互补金属氧化物半导体（CMOS）技术的兼容性。