Yang Fuling, Zong Sicheng, Du Songlin, Yu Xiaoyi, Lu Ke, Liang Shuai, Cao Le, Li Yan
Opt Lett. 2024 Oct 15;49(20):5973-5976. doi: 10.1364/OL.540493.
In this paper, a high sensitivity optical pressure sensor based on a graphene/molybdenum disulfide (MoS) composite film is proposed. The sensor is composed of a polydimethylsiloxane (PDMS) pyramid structure, graphene/MoS composite film, and lithium niobate waveguide. The pressure deforms the PDMS pyramid structure, which leads to the change of the refractive index of the graphene/MoS composite film, and finally be detectable sensitively by the variation of the interference spectrum. Experiments have been carried out using our sensor prototype, and the sensitivity is up to 575.233 nm/kPa in the pressure range of 0 kPa-0.123 kPa, which is much higher than that of typical optical pressure sensors. This shows the advantages of high sensitivity optical pressure sensors based on the graphene/MoS composite film, which is expected to be applied in highly sensitive pressure detection environments.
本文提出了一种基于石墨烯/二硫化钼（MoS）复合薄膜的高灵敏度光学压力传感器。该传感器由聚二甲基硅氧烷（PDMS）金字塔结构、石墨烯/MoS复合薄膜和铌酸锂波导组成。压力使PDMS金字塔结构变形，导致石墨烯/MoS复合薄膜的折射率发生变化，最终通过干涉光谱的变化被灵敏地检测到。利用我们的传感器原型进行了实验，在0 kPa至0.123 kPa的压力范围内灵敏度高达575.233 nm/kPa，远高于典型的光学压力传感器。这显示了基于石墨烯/MoS复合薄膜的高灵敏度光学压力传感器的优势，有望应用于高灵敏度压力检测环境。
