Oh Sangmin, Shekhawat Nehpal Singh, Jameel Osama, Lal Amit, Lee Chung Hoon
Electrical and Computer Engineering Department, Marquette University, Milwaukee, WI, USA.
Polytec Inc., 16400 Bake Pkwy, Irvine, CA, USA.
Microsyst Nanoeng. 2024 Oct 18;10(1):148. doi: 10.1038/s41378-024-00770-w.
Accurate local temperature measurement at micro and nanoscales requires thermometry with high resolution because of ultra-low thermal transport. Among the various methods for measuring temperature, optical techniques have shown the most precise temperature detection, with resolutions reaching (10 K). In this work, we present a nanomechanical device with nano-Kelvin resolution (10 K) at room temperature and 1 atm. The device uses a 20 nm thick silicon nitride (SiN) membrane, forming an air chamber as the sensing area. The presented device has a temperature sensing area >1 mm for micro/nanoscale objects with reduced target placement constraints as the target can be placed anywhere on the >1 mm sensing area. The temperature resolution of the SiN membrane device is determined by deflection at the center of the membrane. The temperature resolution is inversely proportional to the membrane's stiffness, as detailed through analysis and measurements of stiffness and noise equivalent temperature (NET) in the pre-stressed SiN membrane. The achievable heat flow resolution of the membrane device is 100 pW, making it suitable for examining thermal transport on micro and nanoscales.
由于超低温热传输，在微米和纳米尺度上进行精确的局部温度测量需要高分辨率的测温技术。在各种温度测量方法中，光学技术显示出最精确的温度检测，分辨率可达（约10 K）。在这项工作中，我们展示了一种在室温及1个大气压下具有纳开尔文分辨率（约10 K）的纳米机械装置。该装置使用20纳米厚的氮化硅（SiN）膜，形成一个气室作为传感区域。对于微/纳米级物体，所展示的装置具有大于1毫米的温度传感区域，由于目标可以放置在大于1毫米的传感区域上的任何位置，从而减少了目标放置的限制。SiN膜装置的温度分辨率由膜中心的挠度决定。温度分辨率与膜的刚度成反比，这通过对预应力SiN膜的刚度和噪声等效温度（NET）的分析和测量得到了详细说明。膜装置可实现的热流分辨率为100皮瓦，使其适用于研究微纳尺度上的热传输。
